7/27/2010	12:06:08 AM	Helium valve closed
7/27/2010	12:06:08 AM	H2 valve closed
7/27/2010	12:06:08 AM	BCl3 valve closed
7/27/2010	12:06:08 AM	PH3 valve closed
7/27/2010	12:06:08 AM	SiCl4 pre valve closed
7/27/2010	12:06:08 AM	SiCl4 post valve closed
7/27/2010	12:06:08 AM	Bubbler valve closed
7/27/2010	12:06:08 AM	Main Vac valve opened
7/27/2010	12:06:08 AM	Bypass valve opened
7/27/2010	12:06:08 AM	Helium MFC set to  0.000000
7/27/2010	12:06:08 AM	H2 MFC set to  0.000000
7/27/2010	12:06:08 AM	BCl3 MFC set to  0.000000
7/27/2010	12:06:08 AM	PHl3 MFC set to  0.000000
7/27/2010	12:06:08 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:06:08 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:06:08 AM	Tube furnace set to 0
7/27/2010	12:07:08 AM	H2 valve closed
7/27/2010	12:07:08 AM	BCl3 valve closed
7/27/2010	12:07:08 AM	PH3 valve closed
7/27/2010	12:07:08 AM	SiCl4 pre valve closed
7/27/2010	12:07:08 AM	SiCl4 post valve closed
7/27/2010	12:07:08 AM	Bubbler valve closed
7/27/2010	12:07:08 AM	Helium valve opened
7/27/2010	12:07:08 AM	Main Vac valve opened
7/27/2010	12:07:08 AM	Bypass valve opened
7/27/2010	12:07:08 AM	Helium MFC set to  100.000000
7/27/2010	12:07:08 AM	H2 MFC set to  0.000000
7/27/2010	12:07:08 AM	BCl3 MFC set to  0.000000
7/27/2010	12:07:08 AM	PHl3 MFC set to  0.000000
7/27/2010	12:07:08 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:07:08 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:07:09 AM	Tube furnace set to 0
7/27/2010	12:16:09 AM	Helium valve closed
7/27/2010	12:16:09 AM	H2 valve closed
7/27/2010	12:16:09 AM	BCl3 valve closed
7/27/2010	12:16:09 AM	PH3 valve closed
7/27/2010	12:16:09 AM	SiCl4 pre valve closed
7/27/2010	12:16:09 AM	SiCl4 post valve closed
7/27/2010	12:16:09 AM	Bubbler valve closed
7/27/2010	12:16:09 AM	Main Vac valve opened
7/27/2010	12:16:09 AM	Bypass valve opened
7/27/2010	12:16:09 AM	Helium MFC set to  0.000000
7/27/2010	12:16:09 AM	H2 MFC set to  0.000000
7/27/2010	12:16:09 AM	BCl3 MFC set to  0.000000
7/27/2010	12:16:09 AM	PHl3 MFC set to  0.000000
7/27/2010	12:16:09 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:16:09 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:16:09 AM	Tube furnace set to 0
7/27/2010	12:17:09 AM	H2 valve closed
7/27/2010	12:17:09 AM	BCl3 valve closed
7/27/2010	12:17:09 AM	PH3 valve closed
7/27/2010	12:17:09 AM	SiCl4 pre valve closed
7/27/2010	12:17:09 AM	SiCl4 post valve closed
7/27/2010	12:17:09 AM	Bubbler valve closed
7/27/2010	12:17:09 AM	Helium valve opened
7/27/2010	12:17:09 AM	Main Vac valve opened
7/27/2010	12:17:09 AM	Bypass valve opened
7/27/2010	12:17:09 AM	Helium MFC set to  100.000000
7/27/2010	12:17:09 AM	H2 MFC set to  0.000000
7/27/2010	12:17:09 AM	BCl3 MFC set to  0.000000
7/27/2010	12:17:09 AM	PHl3 MFC set to  0.000000
7/27/2010	12:17:09 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:17:09 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:17:09 AM	Tube furnace set to 0
7/27/2010	12:22:17 AM	Helium valve closed
7/27/2010	12:22:17 AM	H2 valve closed
7/27/2010	12:22:17 AM	BCl3 valve closed
7/27/2010	12:22:17 AM	PH3 valve closed
7/27/2010	12:22:17 AM	SiCl4 pre valve closed
7/27/2010	12:22:17 AM	SiCl4 post valve closed
7/27/2010	12:22:17 AM	Bubbler valve closed
7/27/2010	12:22:17 AM	Main Vac valve opened
7/27/2010	12:22:17 AM	Bypass valve opened
7/27/2010	12:22:17 AM	Helium MFC set to  0.000000
7/27/2010	12:22:17 AM	H2 MFC set to  0.000000
7/27/2010	12:22:17 AM	BCl3 MFC set to  0.000000
7/27/2010	12:22:17 AM	PHl3 MFC set to  0.000000
7/27/2010	12:22:17 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:22:17 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:22:17 AM	Tube furnace set to 0
7/27/2010	12:22:18 AM	Run finished at 12:22 AM
7/27/2010	12:23:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/27/2010	12:23:48 AM	Recipe started at 12:23 AM
7/27/2010	12:23:48 AM	Helium valve closed
7/27/2010	12:23:48 AM	H2 valve closed
7/27/2010	12:23:48 AM	BCl3 valve closed
7/27/2010	12:23:48 AM	PH3 valve closed
7/27/2010	12:23:48 AM	SiCl4 pre valve closed
7/27/2010	12:23:48 AM	SiCl4 post valve closed
7/27/2010	12:23:48 AM	Main Vac valve closed
7/27/2010	12:23:48 AM	Bypass valve closed
7/27/2010	12:23:48 AM	Bubbler valve closed
7/27/2010	12:23:48 AM	Helium MFC set to  0.000000
7/27/2010	12:23:48 AM	H2 MFC set to  0.000000
7/27/2010	12:23:48 AM	BCl3 MFC set to  0.000000
7/27/2010	12:23:48 AM	PHl3 MFC set to  0.000000
7/27/2010	12:23:48 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:23:48 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:23:48 AM	Tube furnace set to 0
7/27/2010	12:23:48 AM	Run finished at 12:23 AM
7/27/2010	12:23:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/27/2010	12:24:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	12:24:10 AM	Recipe started at 12:24 AM
7/27/2010	12:24:10 AM	Helium valve closed
7/27/2010	12:24:10 AM	H2 valve closed
7/27/2010	12:24:10 AM	BCl3 valve closed
7/27/2010	12:24:10 AM	PH3 valve closed
7/27/2010	12:24:10 AM	SiCl4 pre valve closed
7/27/2010	12:24:10 AM	SiCl4 post valve closed
7/27/2010	12:24:10 AM	Main Vac valve closed
7/27/2010	12:24:10 AM	Bubbler valve closed
7/27/2010	12:24:10 AM	Bypass valve opened
7/27/2010	12:24:10 AM	Helium MFC set to  0.000000
7/27/2010	12:24:10 AM	H2 MFC set to  0.000000
7/27/2010	12:24:10 AM	BCl3 MFC set to  0.000000
7/27/2010	12:24:10 AM	PHl3 MFC set to  0.000000
7/27/2010	12:24:10 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:24:10 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:24:10 AM	Tube furnace set to 0
7/27/2010	12:24:11 AM	Helium valve closed
7/27/2010	12:24:11 AM	H2 valve closed
7/27/2010	12:24:11 AM	BCl3 valve closed
7/27/2010	12:24:11 AM	PH3 valve closed
7/27/2010	12:24:11 AM	SiCl4 pre valve closed
7/27/2010	12:24:11 AM	SiCl4 post valve closed
7/27/2010	12:24:11 AM	Bubbler valve closed
7/27/2010	12:24:11 AM	Main Vac valve opened
7/27/2010	12:24:11 AM	Bypass valve opened
7/27/2010	12:24:11 AM	Helium MFC set to  0.000000
7/27/2010	12:24:11 AM	H2 MFC set to  0.000000
7/27/2010	12:24:11 AM	BCl3 MFC set to  0.000000
7/27/2010	12:24:11 AM	PHl3 MFC set to  0.000000
7/27/2010	12:24:11 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:24:11 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:24:11 AM	Tube furnace set to 0
7/27/2010	12:24:11 AM	Run finished at 12:24 AM
7/27/2010	12:24:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	12:24:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/27/2010	12:24:55 AM	Recipe started at 12:24 AM
7/27/2010	12:24:55 AM	Helium valve closed
7/27/2010	12:24:55 AM	H2 valve closed
7/27/2010	12:24:55 AM	BCl3 valve closed
7/27/2010	12:24:55 AM	PH3 valve closed
7/27/2010	12:24:55 AM	SiCl4 pre valve closed
7/27/2010	12:24:55 AM	SiCl4 post valve closed
7/27/2010	12:24:55 AM	Main Vac valve closed
7/27/2010	12:24:55 AM	Bypass valve closed
7/27/2010	12:24:55 AM	Bubbler valve closed
7/27/2010	12:24:55 AM	Helium MFC set to  0.000000
7/27/2010	12:24:55 AM	H2 MFC set to  0.000000
7/27/2010	12:24:55 AM	BCl3 MFC set to  0.000000
7/27/2010	12:24:55 AM	PHl3 MFC set to  0.000000
7/27/2010	12:24:55 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:24:55 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:24:56 AM	Tube furnace set to 0
7/27/2010	12:24:56 AM	Run finished at 12:24 AM
7/27/2010	12:24:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/27/2010	12:25:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	12:25:04 AM	Recipe started at 12:25 AM
7/27/2010	12:25:04 AM	Helium valve closed
7/27/2010	12:25:04 AM	H2 valve closed
7/27/2010	12:25:04 AM	BCl3 valve closed
7/27/2010	12:25:04 AM	PH3 valve closed
7/27/2010	12:25:04 AM	SiCl4 pre valve closed
7/27/2010	12:25:04 AM	SiCl4 post valve closed
7/27/2010	12:25:04 AM	Main Vac valve closed
7/27/2010	12:25:04 AM	Bubbler valve closed
7/27/2010	12:25:04 AM	Bypass valve opened
7/27/2010	12:25:04 AM	Helium MFC set to  0.000000
7/27/2010	12:25:04 AM	H2 MFC set to  0.000000
7/27/2010	12:25:04 AM	BCl3 MFC set to  0.000000
7/27/2010	12:25:04 AM	PHl3 MFC set to  0.000000
7/27/2010	12:25:04 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:25:04 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:25:04 AM	Tube furnace set to 0
7/27/2010	12:25:04 AM	Helium valve closed
7/27/2010	12:25:04 AM	H2 valve closed
7/27/2010	12:25:04 AM	BCl3 valve closed
7/27/2010	12:25:04 AM	PH3 valve closed
7/27/2010	12:25:04 AM	SiCl4 pre valve closed
7/27/2010	12:25:04 AM	SiCl4 post valve closed
7/27/2010	12:25:04 AM	Bubbler valve closed
7/27/2010	12:25:04 AM	Main Vac valve opened
7/27/2010	12:25:04 AM	Bypass valve opened
7/27/2010	12:25:04 AM	Helium MFC set to  0.000000
7/27/2010	12:25:04 AM	H2 MFC set to  0.000000
7/27/2010	12:25:04 AM	BCl3 MFC set to  0.000000
7/27/2010	12:25:04 AM	PHl3 MFC set to  0.000000
7/27/2010	12:25:04 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:25:04 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:25:04 AM	Tube furnace set to 0
7/27/2010	12:25:05 AM	Run finished at 12:25 AM
7/27/2010	12:25:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	12:25:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/27/2010	12:25:42 AM	Recipe started at 12:25 AM
7/27/2010	12:25:42 AM	Helium valve closed
7/27/2010	12:25:42 AM	H2 valve closed
7/27/2010	12:25:42 AM	BCl3 valve closed
7/27/2010	12:25:42 AM	PH3 valve closed
7/27/2010	12:25:42 AM	SiCl4 pre valve closed
7/27/2010	12:25:42 AM	SiCl4 post valve closed
7/27/2010	12:25:42 AM	Main Vac valve closed
7/27/2010	12:25:42 AM	Bypass valve closed
7/27/2010	12:25:42 AM	Bubbler valve closed
7/27/2010	12:25:42 AM	Helium MFC set to  0.000000
7/27/2010	12:25:42 AM	H2 MFC set to  0.000000
7/27/2010	12:25:42 AM	BCl3 MFC set to  0.000000
7/27/2010	12:25:42 AM	PHl3 MFC set to  0.000000
7/27/2010	12:25:42 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:25:42 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:25:42 AM	Tube furnace set to 0
7/27/2010	12:25:42 AM	Run finished at 12:25 AM
7/27/2010	12:25:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/27/2010	12:25:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	12:25:51 AM	Recipe started at 12:25 AM
7/27/2010	12:25:51 AM	Helium valve closed
7/27/2010	12:25:51 AM	H2 valve closed
7/27/2010	12:25:51 AM	BCl3 valve closed
7/27/2010	12:25:51 AM	PH3 valve closed
7/27/2010	12:25:51 AM	SiCl4 pre valve closed
7/27/2010	12:25:51 AM	SiCl4 post valve closed
7/27/2010	12:25:51 AM	Main Vac valve closed
7/27/2010	12:25:51 AM	Bubbler valve closed
7/27/2010	12:25:51 AM	Bypass valve opened
7/27/2010	12:25:51 AM	Helium MFC set to  0.000000
7/27/2010	12:25:51 AM	H2 MFC set to  0.000000
7/27/2010	12:25:51 AM	BCl3 MFC set to  0.000000
7/27/2010	12:25:51 AM	PHl3 MFC set to  0.000000
7/27/2010	12:25:51 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:25:51 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:25:51 AM	Tube furnace set to 0
7/27/2010	12:25:51 AM	Helium valve closed
7/27/2010	12:25:51 AM	H2 valve closed
7/27/2010	12:25:51 AM	BCl3 valve closed
7/27/2010	12:25:51 AM	PH3 valve closed
7/27/2010	12:25:51 AM	SiCl4 pre valve closed
7/27/2010	12:25:51 AM	SiCl4 post valve closed
7/27/2010	12:25:51 AM	Bubbler valve closed
7/27/2010	12:25:51 AM	Main Vac valve opened
7/27/2010	12:25:51 AM	Bypass valve opened
7/27/2010	12:25:51 AM	Helium MFC set to  0.000000
7/27/2010	12:25:51 AM	H2 MFC set to  0.000000
7/27/2010	12:25:51 AM	BCl3 MFC set to  0.000000
7/27/2010	12:25:51 AM	PHl3 MFC set to  0.000000
7/27/2010	12:25:51 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:25:51 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:25:51 AM	Tube furnace set to 0
7/27/2010	12:25:52 AM	Run finished at 12:25 AM
7/27/2010	12:25:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	12:26:48 AM	Recipe started at 12:26 AM
7/27/2010	12:26:48 AM	Helium valve closed
7/27/2010	12:26:48 AM	BCl3 valve closed
7/27/2010	12:26:48 AM	PH3 valve closed
7/27/2010	12:26:48 AM	SiCl4 pre valve closed
7/27/2010	12:26:48 AM	SiCl4 post valve closed
7/27/2010	12:26:48 AM	Main Vac valve closed
7/27/2010	12:26:48 AM	Bypass valve closed
7/27/2010	12:26:48 AM	Bubbler valve closed
7/27/2010	12:26:48 AM	H2 valve opened
7/27/2010	12:26:48 AM	Helium MFC set to  0.000000
7/27/2010	12:26:48 AM	H2 MFC set to  500.000000
7/27/2010	12:26:48 AM	BCl3 MFC set to  0.000000
7/27/2010	12:26:48 AM	PHl3 MFC set to  0.000000
7/27/2010	12:26:48 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:26:48 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:26:48 AM	Tube furnace set to 0
7/27/2010	12:28:04 AM	Helium valve closed
7/27/2010	12:28:04 AM	BCl3 valve closed
7/27/2010	12:28:04 AM	PH3 valve closed
7/27/2010	12:28:04 AM	SiCl4 pre valve closed
7/27/2010	12:28:04 AM	SiCl4 post valve closed
7/27/2010	12:28:04 AM	Main Vac valve closed
7/27/2010	12:28:04 AM	Bypass valve closed
7/27/2010	12:28:04 AM	H2 valve opened
7/27/2010	12:28:04 AM	Bubbler valve opened
7/27/2010	12:28:04 AM	Helium MFC set to  0.000000
7/27/2010	12:28:04 AM	H2 MFC set to  500.000000
7/27/2010	12:28:04 AM	BCl3 MFC set to  0.000000
7/27/2010	12:28:04 AM	PHl3 MFC set to  0.000000
7/27/2010	12:28:04 AM	SiCl4 MFC set to  0.000000
7/27/2010	12:28:04 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:28:04 AM	Tube furnace set to 1000
7/27/2010	12:48:04 AM	Helium valve closed
7/27/2010	12:48:04 AM	PH3 valve closed
7/27/2010	12:48:04 AM	Main Vac valve closed
7/27/2010	12:48:04 AM	Bypass valve closed
7/27/2010	12:48:04 AM	H2 valve opened
7/27/2010	12:48:04 AM	BCl3 valve opened
7/27/2010	12:48:04 AM	SiCl4 pre valve opened
7/27/2010	12:48:04 AM	SiCl4 post valve opened
7/27/2010	12:48:04 AM	Bubbler valve opened
7/27/2010	12:48:04 AM	Helium MFC set to  0.000000
7/27/2010	12:48:04 AM	H2 MFC set to  500.000000
7/27/2010	12:48:04 AM	BCl3 MFC set to  6.000000
7/27/2010	12:48:04 AM	PHl3 MFC set to  0.000000
7/27/2010	12:48:04 AM	SiCl4 MFC set to  50.000000
7/27/2010	12:48:04 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:48:04 AM	Tube furnace set to 1000
7/27/2010	1:03:04 AM	H2 valve closed
7/27/2010	1:03:04 AM	BCl3 valve closed
7/27/2010	1:03:04 AM	PH3 valve closed
7/27/2010	1:03:04 AM	SiCl4 pre valve closed
7/27/2010	1:03:04 AM	SiCl4 post valve closed
7/27/2010	1:03:04 AM	Main Vac valve closed
7/27/2010	1:03:04 AM	Bypass valve closed
7/27/2010	1:03:04 AM	Helium valve opened
7/27/2010	1:03:04 AM	Bubbler valve opened
7/27/2010	1:03:04 AM	Helium MFC set to  500.000000
7/27/2010	1:03:04 AM	H2 MFC set to  0.000000
7/27/2010	1:03:04 AM	BCl3 MFC set to  0.000000
7/27/2010	1:03:04 AM	PHl3 MFC set to  0.000000
7/27/2010	1:03:04 AM	SiCl4 MFC set to  0.000000
7/27/2010	1:03:04 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:03:04 AM	Tube furnace set to 0
7/27/2010	1:23:04 AM	Helium valve closed
7/27/2010	1:23:04 AM	H2 valve closed
7/27/2010	1:23:04 AM	BCl3 valve closed
7/27/2010	1:23:04 AM	PH3 valve closed
7/27/2010	1:23:04 AM	SiCl4 pre valve closed
7/27/2010	1:23:04 AM	SiCl4 post valve closed
7/27/2010	1:23:04 AM	Main Vac valve closed
7/27/2010	1:23:04 AM	Bypass valve closed
7/27/2010	1:23:04 AM	Bubbler valve closed
7/27/2010	1:23:04 AM	Helium MFC set to  0.000000
7/27/2010	1:23:04 AM	H2 MFC set to  0.000000
7/27/2010	1:23:04 AM	BCl3 MFC set to  0.000000
7/27/2010	1:23:04 AM	PHl3 MFC set to  0.000000
7/27/2010	1:23:04 AM	SiCl4 MFC set to  0.000000
7/27/2010	1:23:04 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:23:04 AM	Tube furnace set to 0
7/27/2010	1:23:05 AM	Run finished at 1:23 AM
7/27/2010	1:31:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	1:31:58 AM	Recipe started at 1:31 AM
7/27/2010	1:31:58 AM	Helium valve closed
7/27/2010	1:31:58 AM	H2 valve closed
7/27/2010	1:31:58 AM	BCl3 valve closed
7/27/2010	1:31:58 AM	PH3 valve closed
7/27/2010	1:31:58 AM	SiCl4 pre valve closed
7/27/2010	1:31:58 AM	SiCl4 post valve closed
7/27/2010	1:31:58 AM	Main Vac valve closed
7/27/2010	1:31:58 AM	Bubbler valve closed
7/27/2010	1:31:58 AM	Bypass valve opened
7/27/2010	1:31:58 AM	Helium MFC set to  0.000000
7/27/2010	1:31:58 AM	H2 MFC set to  0.000000
7/27/2010	1:31:58 AM	BCl3 MFC set to  0.000000
7/27/2010	1:31:58 AM	PHl3 MFC set to  0.000000
7/27/2010	1:31:58 AM	SiCl4 MFC set to  0.000000
7/27/2010	1:31:58 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:31:58 AM	Tube furnace set to 0
7/27/2010	1:32:32 AM	Helium valve closed
7/27/2010	1:32:32 AM	H2 valve closed
7/27/2010	1:32:32 AM	BCl3 valve closed
7/27/2010	1:32:32 AM	PH3 valve closed
7/27/2010	1:32:32 AM	SiCl4 pre valve closed
7/27/2010	1:32:32 AM	SiCl4 post valve closed
7/27/2010	1:32:32 AM	Bubbler valve closed
7/27/2010	1:32:32 AM	Main Vac valve opened
7/27/2010	1:32:32 AM	Bypass valve opened
7/27/2010	1:32:32 AM	Helium MFC set to  0.000000
7/27/2010	1:32:32 AM	H2 MFC set to  0.000000
7/27/2010	1:32:32 AM	BCl3 MFC set to  0.000000
7/27/2010	1:32:32 AM	PHl3 MFC set to  0.000000
7/27/2010	1:32:32 AM	SiCl4 MFC set to  0.000000
7/27/2010	1:32:32 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:32:32 AM	Tube furnace set to 0
7/27/2010	1:32:33 AM	Run finished at 1:32 AM
7/27/2010	1:32:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	1:32:45 AM	Recipe started at 1:32 AM
7/27/2010	1:32:45 AM	Helium valve closed
7/27/2010	1:32:45 AM	H2 valve closed
7/27/2010	1:32:45 AM	BCl3 valve closed
7/27/2010	1:32:45 AM	PH3 valve closed
7/27/2010	1:32:45 AM	SiCl4 pre valve closed
7/27/2010	1:32:45 AM	SiCl4 post valve closed
7/27/2010	1:32:45 AM	Main Vac valve closed
7/27/2010	1:32:45 AM	Bubbler valve closed
7/27/2010	1:32:45 AM	Bypass valve opened
7/27/2010	1:32:45 AM	Helium MFC set to  0.000000
7/27/2010	1:32:45 AM	H2 MFC set to  0.000000
7/27/2010	1:32:45 AM	BCl3 MFC set to  0.000000
7/27/2010	1:32:45 AM	PHl3 MFC set to  0.000000
7/27/2010	1:32:45 AM	SiCl4 MFC set to  0.000000
7/27/2010	1:32:45 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:32:45 AM	Tube furnace set to 0
7/27/2010	1:32:45 AM	Helium valve closed
7/27/2010	1:32:45 AM	H2 valve closed
7/27/2010	1:32:45 AM	BCl3 valve closed
7/27/2010	1:32:45 AM	PH3 valve closed
7/27/2010	1:32:45 AM	SiCl4 pre valve closed
7/27/2010	1:32:45 AM	SiCl4 post valve closed
7/27/2010	1:32:45 AM	Bubbler valve closed
7/27/2010	1:32:45 AM	Main Vac valve opened
7/27/2010	1:32:45 AM	Bypass valve opened
7/27/2010	1:32:45 AM	Helium MFC set to  0.000000
7/27/2010	1:32:45 AM	H2 MFC set to  0.000000
7/27/2010	1:32:45 AM	BCl3 MFC set to  0.000000
7/27/2010	1:32:45 AM	PHl3 MFC set to  0.000000
7/27/2010	1:32:45 AM	SiCl4 MFC set to  0.000000
7/27/2010	1:32:45 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:32:46 AM	Tube furnace set to 0
7/27/2010	1:33:46 AM	H2 valve closed
7/27/2010	1:33:46 AM	BCl3 valve closed
7/27/2010	1:33:46 AM	PH3 valve closed
7/27/2010	1:33:46 AM	SiCl4 pre valve closed
7/27/2010	1:33:46 AM	SiCl4 post valve closed
7/27/2010	1:33:46 AM	Bubbler valve closed
7/27/2010	1:33:46 AM	Helium valve opened
7/27/2010	1:33:46 AM	Main Vac valve opened
7/27/2010	1:33:46 AM	Bypass valve opened
7/27/2010	1:33:46 AM	Helium MFC set to  100.000000
7/27/2010	1:33:46 AM	H2 MFC set to  0.000000
7/27/2010	1:33:46 AM	BCl3 MFC set to  0.000000
7/27/2010	1:33:46 AM	PHl3 MFC set to  0.000000
7/27/2010	1:33:46 AM	SiCl4 MFC set to  0.000000
7/27/2010	1:33:46 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:33:46 AM	Tube furnace set to 0
7/27/2010	1:42:46 AM	Helium valve closed
7/27/2010	1:42:46 AM	H2 valve closed
7/27/2010	1:42:46 AM	BCl3 valve closed
7/27/2010	1:42:46 AM	PH3 valve closed
7/27/2010	1:42:46 AM	SiCl4 pre valve closed
7/27/2010	1:42:46 AM	SiCl4 post valve closed
7/27/2010	1:42:46 AM	Bubbler valve closed
7/27/2010	1:42:46 AM	Main Vac valve opened
7/27/2010	1:42:46 AM	Bypass valve opened
7/27/2010	1:42:46 AM	Helium MFC set to  0.000000
7/27/2010	1:42:46 AM	H2 MFC set to  0.000000
7/27/2010	1:42:46 AM	BCl3 MFC set to  0.000000
7/27/2010	1:42:46 AM	PHl3 MFC set to  0.000000
7/27/2010	1:42:46 AM	SiCl4 MFC set to  0.000000
7/27/2010	1:42:46 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:42:46 AM	Tube furnace set to 0
7/27/2010	1:43:46 AM	H2 valve closed
7/27/2010	1:43:46 AM	BCl3 valve closed
7/27/2010	1:43:46 AM	PH3 valve closed
7/27/2010	1:43:46 AM	SiCl4 pre valve closed
7/27/2010	1:43:46 AM	SiCl4 post valve closed
7/27/2010	1:43:46 AM	Bubbler valve closed
7/27/2010	1:43:46 AM	Helium valve opened
7/27/2010	1:43:46 AM	Main Vac valve opened
7/27/2010	1:43:46 AM	Bypass valve opened
7/27/2010	1:43:46 AM	Helium MFC set to  100.000000
7/27/2010	1:43:46 AM	H2 MFC set to  0.000000
7/27/2010	1:43:46 AM	BCl3 MFC set to  0.000000
7/27/2010	1:43:46 AM	PHl3 MFC set to  0.000000
7/27/2010	1:43:46 AM	SiCl4 MFC set to  0.000000
7/27/2010	1:43:46 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:43:46 AM	Tube furnace set to 0
7/27/2010	1:52:46 AM	Helium valve closed
7/27/2010	1:52:46 AM	H2 valve closed
7/27/2010	1:52:46 AM	BCl3 valve closed
7/27/2010	1:52:46 AM	PH3 valve closed
7/27/2010	1:52:46 AM	SiCl4 pre valve closed
7/27/2010	1:52:46 AM	SiCl4 post valve closed
7/27/2010	1:52:46 AM	Bubbler valve closed
7/27/2010	1:52:46 AM	Main Vac valve opened
7/27/2010	1:52:46 AM	Bypass valve opened
7/27/2010	1:52:46 AM	Helium MFC set to  0.000000
7/27/2010	1:52:46 AM	H2 MFC set to  0.000000
7/27/2010	1:52:46 AM	BCl3 MFC set to  0.000000
7/27/2010	1:52:46 AM	PHl3 MFC set to  0.000000
7/27/2010	1:52:46 AM	SiCl4 MFC set to  0.000000
7/27/2010	1:52:46 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:52:46 AM	Tube furnace set to 0
7/27/2010	1:53:46 AM	H2 valve closed
7/27/2010	1:53:46 AM	BCl3 valve closed
7/27/2010	1:53:46 AM	PH3 valve closed
7/27/2010	1:53:46 AM	SiCl4 pre valve closed
7/27/2010	1:53:46 AM	SiCl4 post valve closed
7/27/2010	1:53:46 AM	Bubbler valve closed
7/27/2010	1:53:46 AM	Helium valve opened
7/27/2010	1:53:46 AM	Main Vac valve opened
7/27/2010	1:53:46 AM	Bypass valve opened
7/27/2010	1:53:46 AM	Helium MFC set to  100.000000
7/27/2010	1:53:46 AM	H2 MFC set to  0.000000
7/27/2010	1:53:46 AM	BCl3 MFC set to  0.000000
7/27/2010	1:53:46 AM	PHl3 MFC set to  0.000000
7/27/2010	1:53:46 AM	SiCl4 MFC set to  0.000000
7/27/2010	1:53:46 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:53:47 AM	Tube furnace set to 0
7/27/2010	1:58:30 AM	Helium valve closed
7/27/2010	1:58:30 AM	H2 valve closed
7/27/2010	1:58:30 AM	BCl3 valve closed
7/27/2010	1:58:30 AM	PH3 valve closed
7/27/2010	1:58:30 AM	SiCl4 pre valve closed
7/27/2010	1:58:30 AM	SiCl4 post valve closed
7/27/2010	1:58:30 AM	Bubbler valve closed
7/27/2010	1:58:30 AM	Main Vac valve opened
7/27/2010	1:58:30 AM	Bypass valve opened
7/27/2010	1:58:30 AM	Helium MFC set to  0.000000
7/27/2010	1:58:30 AM	H2 MFC set to  0.000000
7/27/2010	1:58:30 AM	BCl3 MFC set to  0.000000
7/27/2010	1:58:30 AM	PHl3 MFC set to  0.000000
7/27/2010	1:58:30 AM	SiCl4 MFC set to  0.000000
7/27/2010	1:58:30 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:58:30 AM	Tube furnace set to 0
7/27/2010	1:58:31 AM	Run finished at 1:58 AM
7/27/2010	2:03:01 AM	Recipe started at 2:03 AM
7/27/2010	2:03:01 AM	Helium valve closed
7/27/2010	2:03:01 AM	H2 valve closed
7/27/2010	2:03:01 AM	BCl3 valve closed
7/27/2010	2:03:01 AM	PH3 valve closed
7/27/2010	2:03:01 AM	SiCl4 pre valve closed
7/27/2010	2:03:01 AM	SiCl4 post valve closed
7/27/2010	2:03:01 AM	Main Vac valve closed
7/27/2010	2:03:01 AM	Bubbler valve closed
7/27/2010	2:03:01 AM	Bypass valve opened
7/27/2010	2:03:01 AM	Helium MFC set to  0.000000
7/27/2010	2:03:01 AM	H2 MFC set to  0.000000
7/27/2010	2:03:01 AM	BCl3 MFC set to  0.000000
7/27/2010	2:03:01 AM	PHl3 MFC set to  0.000000
7/27/2010	2:03:01 AM	SiCl4 MFC set to  0.000000
7/27/2010	2:03:01 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:03:02 AM	Tube furnace set to 0
7/27/2010	2:03:02 AM	Helium valve closed
7/27/2010	2:03:02 AM	H2 valve closed
7/27/2010	2:03:02 AM	BCl3 valve closed
7/27/2010	2:03:02 AM	PH3 valve closed
7/27/2010	2:03:02 AM	SiCl4 pre valve closed
7/27/2010	2:03:02 AM	SiCl4 post valve closed
7/27/2010	2:03:02 AM	Bubbler valve closed
7/27/2010	2:03:02 AM	Main Vac valve opened
7/27/2010	2:03:02 AM	Bypass valve opened
7/27/2010	2:03:02 AM	Helium MFC set to  0.000000
7/27/2010	2:03:02 AM	H2 MFC set to  0.000000
7/27/2010	2:03:02 AM	BCl3 MFC set to  0.000000
7/27/2010	2:03:02 AM	PHl3 MFC set to  0.000000
7/27/2010	2:03:02 AM	SiCl4 MFC set to  0.000000
7/27/2010	2:03:02 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:03:02 AM	Tube furnace set to 0
7/27/2010	2:03:05 AM	H2 valve closed
7/27/2010	2:03:05 AM	BCl3 valve closed
7/27/2010	2:03:05 AM	PH3 valve closed
7/27/2010	2:03:05 AM	SiCl4 pre valve closed
7/27/2010	2:03:05 AM	SiCl4 post valve closed
7/27/2010	2:03:05 AM	Bubbler valve closed
7/27/2010	2:03:05 AM	Helium valve opened
7/27/2010	2:03:05 AM	Main Vac valve opened
7/27/2010	2:03:05 AM	Bypass valve opened
7/27/2010	2:03:05 AM	Helium MFC set to  100.000000
7/27/2010	2:03:05 AM	H2 MFC set to  0.000000
7/27/2010	2:03:05 AM	BCl3 MFC set to  0.000000
7/27/2010	2:03:05 AM	PHl3 MFC set to  0.000000
7/27/2010	2:03:05 AM	SiCl4 MFC set to  0.000000
7/27/2010	2:03:05 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:03:05 AM	Tube furnace set to 0
7/27/2010	2:03:07 AM	Helium valve closed
7/27/2010	2:03:07 AM	H2 valve closed
7/27/2010	2:03:07 AM	BCl3 valve closed
7/27/2010	2:03:07 AM	PH3 valve closed
7/27/2010	2:03:07 AM	SiCl4 pre valve closed
7/27/2010	2:03:07 AM	SiCl4 post valve closed
7/27/2010	2:03:07 AM	Bubbler valve closed
7/27/2010	2:03:07 AM	Main Vac valve opened
7/27/2010	2:03:07 AM	Bypass valve opened
7/27/2010	2:03:07 AM	Helium MFC set to  0.000000
7/27/2010	2:03:07 AM	H2 MFC set to  0.000000
7/27/2010	2:03:07 AM	BCl3 MFC set to  0.000000
7/27/2010	2:03:07 AM	PHl3 MFC set to  0.000000
7/27/2010	2:03:07 AM	SiCl4 MFC set to  0.000000
7/27/2010	2:03:07 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:03:07 AM	Tube furnace set to 0
7/27/2010	2:03:08 AM	H2 valve closed
7/27/2010	2:03:08 AM	BCl3 valve closed
7/27/2010	2:03:08 AM	PH3 valve closed
7/27/2010	2:03:08 AM	SiCl4 pre valve closed
7/27/2010	2:03:08 AM	SiCl4 post valve closed
7/27/2010	2:03:08 AM	Bubbler valve closed
7/27/2010	2:03:08 AM	Helium valve opened
7/27/2010	2:03:08 AM	Main Vac valve opened
7/27/2010	2:03:08 AM	Bypass valve opened
7/27/2010	2:03:08 AM	Helium MFC set to  100.000000
7/27/2010	2:03:08 AM	H2 MFC set to  0.000000
7/27/2010	2:03:08 AM	BCl3 MFC set to  0.000000
7/27/2010	2:03:08 AM	PHl3 MFC set to  0.000000
7/27/2010	2:03:08 AM	SiCl4 MFC set to  0.000000
7/27/2010	2:03:08 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:03:08 AM	Tube furnace set to 0
7/27/2010	2:03:09 AM	Helium valve closed
7/27/2010	2:03:09 AM	H2 valve closed
7/27/2010	2:03:09 AM	BCl3 valve closed
7/27/2010	2:03:09 AM	PH3 valve closed
7/27/2010	2:03:09 AM	SiCl4 pre valve closed
7/27/2010	2:03:09 AM	SiCl4 post valve closed
7/27/2010	2:03:09 AM	Bubbler valve closed
7/27/2010	2:03:09 AM	Main Vac valve opened
7/27/2010	2:03:09 AM	Bypass valve opened
7/27/2010	2:03:09 AM	Helium MFC set to  0.000000
7/27/2010	2:03:09 AM	H2 MFC set to  0.000000
7/27/2010	2:03:09 AM	BCl3 MFC set to  0.000000
7/27/2010	2:03:09 AM	PHl3 MFC set to  0.000000
7/27/2010	2:03:09 AM	SiCl4 MFC set to  0.000000
7/27/2010	2:03:09 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:03:09 AM	Tube furnace set to 0
7/27/2010	2:03:09 AM	H2 valve closed
7/27/2010	2:03:09 AM	BCl3 valve closed
7/27/2010	2:03:09 AM	PH3 valve closed
7/27/2010	2:03:09 AM	SiCl4 pre valve closed
7/27/2010	2:03:09 AM	SiCl4 post valve closed
7/27/2010	2:03:09 AM	Bubbler valve closed
7/27/2010	2:03:09 AM	Helium valve opened
7/27/2010	2:03:09 AM	Main Vac valve opened
7/27/2010	2:03:09 AM	Bypass valve opened
7/27/2010	2:03:09 AM	Helium MFC set to  100.000000
7/27/2010	2:03:09 AM	H2 MFC set to  0.000000
7/27/2010	2:03:09 AM	BCl3 MFC set to  0.000000
7/27/2010	2:03:09 AM	PHl3 MFC set to  0.000000
7/27/2010	2:03:09 AM	SiCl4 MFC set to  0.000000
7/27/2010	2:03:09 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:03:09 AM	Tube furnace set to 0
7/27/2010	2:12:09 AM	Helium valve closed
7/27/2010	2:12:10 AM	H2 valve closed
7/27/2010	2:12:10 AM	BCl3 valve closed
7/27/2010	2:12:10 AM	PH3 valve closed
7/27/2010	2:12:10 AM	SiCl4 pre valve closed
7/27/2010	2:12:10 AM	SiCl4 post valve closed
7/27/2010	2:12:10 AM	Bubbler valve closed
7/27/2010	2:12:10 AM	Main Vac valve opened
7/27/2010	2:12:10 AM	Bypass valve opened
7/27/2010	2:12:10 AM	Helium MFC set to  0.000000
7/27/2010	2:12:10 AM	H2 MFC set to  0.000000
7/27/2010	2:12:10 AM	BCl3 MFC set to  0.000000
7/27/2010	2:12:10 AM	PHl3 MFC set to  0.000000
7/27/2010	2:12:10 AM	SiCl4 MFC set to  0.000000
7/27/2010	2:12:10 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:12:10 AM	Tube furnace set to 0
7/27/2010	2:12:11 AM	Run finished at 2:12 AM
7/27/2010	2:13:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/27/2010	2:13:37 AM	Recipe started at 2:13 AM
7/27/2010	2:13:37 AM	Helium valve closed
7/27/2010	2:13:37 AM	H2 valve closed
7/27/2010	2:13:37 AM	BCl3 valve closed
7/27/2010	2:13:37 AM	PH3 valve closed
7/27/2010	2:13:37 AM	SiCl4 pre valve closed
7/27/2010	2:13:37 AM	SiCl4 post valve closed
7/27/2010	2:13:37 AM	Main Vac valve closed
7/27/2010	2:13:37 AM	Bypass valve closed
7/27/2010	2:13:37 AM	Bubbler valve closed
7/27/2010	2:13:37 AM	Helium MFC set to  0.000000
7/27/2010	2:13:37 AM	H2 MFC set to  0.000000
7/27/2010	2:13:37 AM	BCl3 MFC set to  0.000000
7/27/2010	2:13:37 AM	PHl3 MFC set to  0.000000
7/27/2010	2:13:37 AM	SiCl4 MFC set to  0.000000
7/27/2010	2:13:37 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:13:37 AM	Tube furnace set to 0
7/27/2010	2:13:38 AM	Run finished at 2:13 AM
7/27/2010	2:13:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/27/2010	2:13:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	2:13:49 AM	Recipe started at 2:13 AM
7/27/2010	2:13:49 AM	Helium valve closed
7/27/2010	2:13:49 AM	H2 valve closed
7/27/2010	2:13:49 AM	BCl3 valve closed
7/27/2010	2:13:49 AM	PH3 valve closed
7/27/2010	2:13:49 AM	SiCl4 pre valve closed
7/27/2010	2:13:49 AM	SiCl4 post valve closed
7/27/2010	2:13:49 AM	Main Vac valve closed
7/27/2010	2:13:49 AM	Bubbler valve closed
7/27/2010	2:13:49 AM	Bypass valve opened
7/27/2010	2:13:49 AM	Helium MFC set to  0.000000
7/27/2010	2:13:49 AM	H2 MFC set to  0.000000
7/27/2010	2:13:49 AM	BCl3 MFC set to  0.000000
7/27/2010	2:13:49 AM	PHl3 MFC set to  0.000000
7/27/2010	2:13:49 AM	SiCl4 MFC set to  0.000000
7/27/2010	2:13:49 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:13:49 AM	Tube furnace set to 0
7/27/2010	2:13:50 AM	Helium valve closed
7/27/2010	2:13:50 AM	H2 valve closed
7/27/2010	2:13:50 AM	BCl3 valve closed
7/27/2010	2:13:50 AM	PH3 valve closed
7/27/2010	2:13:50 AM	SiCl4 pre valve closed
7/27/2010	2:13:50 AM	SiCl4 post valve closed
7/27/2010	2:13:50 AM	Bubbler valve closed
7/27/2010	2:13:50 AM	Main Vac valve opened
7/27/2010	2:13:50 AM	Bypass valve opened
7/27/2010	2:13:50 AM	Helium MFC set to  0.000000
7/27/2010	2:13:50 AM	H2 MFC set to  0.000000
7/27/2010	2:13:50 AM	BCl3 MFC set to  0.000000
7/27/2010	2:13:50 AM	PHl3 MFC set to  0.000000
7/27/2010	2:13:50 AM	SiCl4 MFC set to  0.000000
7/27/2010	2:13:50 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:13:50 AM	Tube furnace set to 0
7/27/2010	2:13:50 AM	Run finished at 2:13 AM
7/27/2010	2:13:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	2:14:33 AM	Recipe started at 2:14 AM
7/27/2010	2:14:33 AM	Helium valve closed
7/27/2010	2:14:33 AM	BCl3 valve closed
7/27/2010	2:14:33 AM	PH3 valve closed
7/27/2010	2:14:33 AM	SiCl4 pre valve closed
7/27/2010	2:14:33 AM	SiCl4 post valve closed
7/27/2010	2:14:33 AM	Main Vac valve closed
7/27/2010	2:14:33 AM	Bypass valve closed
7/27/2010	2:14:33 AM	Bubbler valve closed
7/27/2010	2:14:33 AM	H2 valve opened
7/27/2010	2:14:33 AM	Helium MFC set to  0.000000
7/27/2010	2:14:33 AM	H2 MFC set to  500.000000
7/27/2010	2:14:33 AM	BCl3 MFC set to  0.000000
7/27/2010	2:14:33 AM	PHl3 MFC set to  0.000000
7/27/2010	2:14:33 AM	SiCl4 MFC set to  0.000000
7/27/2010	2:14:33 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:14:33 AM	Tube furnace set to 0
7/27/2010	2:15:49 AM	Helium valve closed
7/27/2010	2:15:49 AM	BCl3 valve closed
7/27/2010	2:15:49 AM	PH3 valve closed
7/27/2010	2:15:49 AM	SiCl4 pre valve closed
7/27/2010	2:15:49 AM	SiCl4 post valve closed
7/27/2010	2:15:49 AM	Main Vac valve closed
7/27/2010	2:15:49 AM	Bypass valve closed
7/27/2010	2:15:49 AM	H2 valve opened
7/27/2010	2:15:49 AM	Bubbler valve opened
7/27/2010	2:15:49 AM	Helium MFC set to  0.000000
7/27/2010	2:15:49 AM	H2 MFC set to  500.000000
7/27/2010	2:15:49 AM	BCl3 MFC set to  0.000000
7/27/2010	2:15:49 AM	PHl3 MFC set to  0.000000
7/27/2010	2:15:49 AM	SiCl4 MFC set to  0.000000
7/27/2010	2:15:49 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:15:49 AM	Tube furnace set to 1000
7/27/2010	2:35:49 AM	Helium valve closed
7/27/2010	2:35:49 AM	PH3 valve closed
7/27/2010	2:35:49 AM	Main Vac valve closed
7/27/2010	2:35:49 AM	Bypass valve closed
7/27/2010	2:35:49 AM	H2 valve opened
7/27/2010	2:35:49 AM	BCl3 valve opened
7/27/2010	2:35:49 AM	SiCl4 pre valve opened
7/27/2010	2:35:49 AM	SiCl4 post valve opened
7/27/2010	2:35:49 AM	Bubbler valve opened
7/27/2010	2:35:49 AM	Helium MFC set to  0.000000
7/27/2010	2:35:49 AM	H2 MFC set to  500.000000
7/27/2010	2:35:49 AM	BCl3 MFC set to  6.000000
7/27/2010	2:35:49 AM	PHl3 MFC set to  0.000000
7/27/2010	2:35:49 AM	SiCl4 MFC set to  50.000000
7/27/2010	2:35:49 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:35:49 AM	Tube furnace set to 1000
7/27/2010	2:50:49 AM	H2 valve closed
7/27/2010	2:50:49 AM	BCl3 valve closed
7/27/2010	2:50:49 AM	PH3 valve closed
7/27/2010	2:50:49 AM	SiCl4 pre valve closed
7/27/2010	2:50:49 AM	SiCl4 post valve closed
7/27/2010	2:50:49 AM	Main Vac valve closed
7/27/2010	2:50:49 AM	Bypass valve closed
7/27/2010	2:50:49 AM	Helium valve opened
7/27/2010	2:50:49 AM	Bubbler valve opened
7/27/2010	2:50:49 AM	Helium MFC set to  500.000000
7/27/2010	2:50:49 AM	H2 MFC set to  0.000000
7/27/2010	2:50:49 AM	BCl3 MFC set to  0.000000
7/27/2010	2:50:49 AM	PHl3 MFC set to  0.000000
7/27/2010	2:50:49 AM	SiCl4 MFC set to  0.000000
7/27/2010	2:50:49 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:50:50 AM	Tube furnace set to 0
7/27/2010	3:10:49 AM	Helium valve closed
7/27/2010	3:10:49 AM	H2 valve closed
7/27/2010	3:10:49 AM	BCl3 valve closed
7/27/2010	3:10:49 AM	PH3 valve closed
7/27/2010	3:10:49 AM	SiCl4 pre valve closed
7/27/2010	3:10:49 AM	SiCl4 post valve closed
7/27/2010	3:10:49 AM	Main Vac valve closed
7/27/2010	3:10:49 AM	Bypass valve closed
7/27/2010	3:10:49 AM	Bubbler valve closed
7/27/2010	3:10:49 AM	Helium MFC set to  0.000000
7/27/2010	3:10:49 AM	H2 MFC set to  0.000000
7/27/2010	3:10:49 AM	BCl3 MFC set to  0.000000
7/27/2010	3:10:49 AM	PHl3 MFC set to  0.000000
7/27/2010	3:10:50 AM	SiCl4 MFC set to  0.000000
7/27/2010	3:10:50 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	3:10:50 AM	Tube furnace set to 0
7/27/2010	3:10:50 AM	Run finished at 3:10 AM
7/27/2010	3:13:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	3:13:40 AM	Recipe started at 3:13 AM
7/27/2010	3:13:40 AM	Helium valve closed
7/27/2010	3:13:40 AM	H2 valve closed
7/27/2010	3:13:40 AM	BCl3 valve closed
7/27/2010	3:13:40 AM	PH3 valve closed
7/27/2010	3:13:40 AM	SiCl4 pre valve closed
7/27/2010	3:13:40 AM	SiCl4 post valve closed
7/27/2010	3:13:40 AM	Main Vac valve closed
7/27/2010	3:13:40 AM	Bubbler valve closed
7/27/2010	3:13:40 AM	Bypass valve opened
7/27/2010	3:13:40 AM	Helium MFC set to  0.000000
7/27/2010	3:13:40 AM	H2 MFC set to  0.000000
7/27/2010	3:13:40 AM	BCl3 MFC set to  0.000000
7/27/2010	3:13:40 AM	PHl3 MFC set to  0.000000
7/27/2010	3:13:40 AM	SiCl4 MFC set to  0.000000
7/27/2010	3:13:40 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	3:13:40 AM	Tube furnace set to 0
7/27/2010	3:14:12 AM	Helium valve closed
7/27/2010	3:14:12 AM	H2 valve closed
7/27/2010	3:14:12 AM	BCl3 valve closed
7/27/2010	3:14:12 AM	PH3 valve closed
7/27/2010	3:14:12 AM	SiCl4 pre valve closed
7/27/2010	3:14:12 AM	SiCl4 post valve closed
7/27/2010	3:14:12 AM	Bubbler valve closed
7/27/2010	3:14:12 AM	Main Vac valve opened
7/27/2010	3:14:12 AM	Bypass valve opened
7/27/2010	3:14:12 AM	Helium MFC set to  0.000000
7/27/2010	3:14:12 AM	H2 MFC set to  0.000000
7/27/2010	3:14:12 AM	BCl3 MFC set to  0.000000
7/27/2010	3:14:12 AM	PHl3 MFC set to  0.000000
7/27/2010	3:14:12 AM	SiCl4 MFC set to  0.000000
7/27/2010	3:14:12 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	3:14:12 AM	Tube furnace set to 0
7/27/2010	3:14:13 AM	Run finished at 3:14 AM
7/27/2010	3:14:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	8:49:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2010	8:49:56 AM	Recipe started at 8:49 AM
7/27/2010	8:49:56 AM	H2 valve closed
7/27/2010	8:49:56 AM	BCl3 valve closed
7/27/2010	8:49:56 AM	PH3 valve closed
7/27/2010	8:49:56 AM	SiCl4 pre valve closed
7/27/2010	8:49:56 AM	SiCl4 post valve closed
7/27/2010	8:49:56 AM	Main Vac valve closed
7/27/2010	8:49:56 AM	Bypass valve closed
7/27/2010	8:49:56 AM	Bubbler valve closed
7/27/2010	8:49:56 AM	Helium valve opened
7/27/2010	8:49:56 AM	Helium MFC set to  500.000000
7/27/2010	8:49:56 AM	H2 MFC set to  0.000000
7/27/2010	8:49:56 AM	BCl3 MFC set to  0.000000
7/27/2010	8:49:56 AM	PHl3 MFC set to  0.000000
7/27/2010	8:49:56 AM	SiCl4 MFC set to  0.000000
7/27/2010	8:49:56 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	8:49:56 AM	Tube furnace set to 0
7/27/2010	8:51:16 AM	Helium valve closed
7/27/2010	8:51:16 AM	H2 valve closed
7/27/2010	8:51:16 AM	BCl3 valve closed
7/27/2010	8:51:16 AM	PH3 valve closed
7/27/2010	8:51:16 AM	SiCl4 pre valve closed
7/27/2010	8:51:16 AM	SiCl4 post valve closed
7/27/2010	8:51:16 AM	Main Vac valve closed
7/27/2010	8:51:16 AM	Bypass valve closed
7/27/2010	8:51:16 AM	Bubbler valve closed
7/27/2010	8:51:16 AM	Helium MFC set to  0.000000
7/27/2010	8:51:16 AM	H2 MFC set to  0.000000
7/27/2010	8:51:16 AM	BCl3 MFC set to  0.000000
7/27/2010	8:51:16 AM	PHl3 MFC set to  0.000000
7/27/2010	8:51:16 AM	SiCl4 MFC set to  0.000000
7/27/2010	8:51:16 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	8:51:16 AM	Tube furnace set to 0
7/27/2010	8:51:16 AM	Run finished at 8:51 AM
7/27/2010	8:51:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2010	8:58:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/27/2010	8:59:05 AM	Recipe started at 8:59 AM
7/27/2010	8:59:05 AM	H2 valve closed
7/27/2010	8:59:05 AM	BCl3 valve closed
7/27/2010	8:59:05 AM	PH3 valve closed
7/27/2010	8:59:05 AM	SiCl4 pre valve closed
7/27/2010	8:59:05 AM	SiCl4 post valve closed
7/27/2010	8:59:05 AM	Main Vac valve closed
7/27/2010	8:59:05 AM	Bypass valve closed
7/27/2010	8:59:05 AM	Bubbler valve closed
7/27/2010	8:59:05 AM	Helium valve opened
7/27/2010	8:59:05 AM	Helium MFC set to  500.000000
7/27/2010	8:59:05 AM	H2 MFC set to  0.000000
7/27/2010	8:59:05 AM	BCl3 MFC set to  0.000000
7/27/2010	8:59:05 AM	PHl3 MFC set to  0.000000
7/27/2010	8:59:05 AM	SiCl4 MFC set to  0.000000
7/27/2010	8:59:05 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	8:59:05 AM	Tube furnace set to 0
7/27/2010	8:59:07 AM	Helium valve closed
7/27/2010	8:59:07 AM	H2 valve closed
7/27/2010	8:59:07 AM	BCl3 valve closed
7/27/2010	8:59:07 AM	PH3 valve closed
7/27/2010	8:59:07 AM	SiCl4 pre valve closed
7/27/2010	8:59:07 AM	SiCl4 post valve closed
7/27/2010	8:59:07 AM	Main Vac valve closed
7/27/2010	8:59:07 AM	Bypass valve closed
7/27/2010	8:59:07 AM	Bubbler valve closed
7/27/2010	8:59:07 AM	Helium MFC set to  0.000000
7/27/2010	8:59:07 AM	H2 MFC set to  0.000000
7/27/2010	8:59:07 AM	BCl3 MFC set to  0.000000
7/27/2010	8:59:07 AM	PHl3 MFC set to  0.000000
7/27/2010	8:59:07 AM	SiCl4 MFC set to  0.000000
7/27/2010	8:59:07 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	8:59:07 AM	Tube furnace set to 0
7/27/2010	8:59:22 AM	Helium valve closed
7/27/2010	8:59:22 AM	H2 valve closed
7/27/2010	8:59:22 AM	BCl3 valve closed
7/27/2010	8:59:22 AM	PH3 valve closed
7/27/2010	8:59:22 AM	SiCl4 pre valve closed
7/27/2010	8:59:22 AM	SiCl4 post valve closed
7/27/2010	8:59:22 AM	Main Vac valve closed
7/27/2010	8:59:22 AM	Bubbler valve closed
7/27/2010	8:59:22 AM	Bypass valve opened
7/27/2010	8:59:22 AM	Helium MFC set to  0.000000
7/27/2010	8:59:22 AM	H2 MFC set to  0.000000
7/27/2010	8:59:22 AM	BCl3 MFC set to  0.000000
7/27/2010	8:59:22 AM	PHl3 MFC set to  0.000000
7/27/2010	8:59:22 AM	SiCl4 MFC set to  0.000000
7/27/2010	8:59:22 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	8:59:22 AM	Tube furnace set to 0
7/27/2010	8:59:55 AM	Run aborted at 8:59 AM
7/27/2010	8:59:55 AM	Helium valve closed
7/27/2010	8:59:55 AM	H2 valve closed
7/27/2010	8:59:55 AM	BCl3 valve closed
7/27/2010	8:59:55 AM	PH3 valve closed
7/27/2010	8:59:55 AM	SiCl4 pre valve closed
7/27/2010	8:59:55 AM	SiCl4 post valve closed
7/27/2010	8:59:55 AM	Bypass valve closed
7/27/2010	8:59:55 AM	Main Vac valve closed
7/27/2010	8:59:55 AM	Bubbler valve closed
7/27/2010	8:59:55 AM	Helium MFC set to  0.000000
7/27/2010	8:59:55 AM	H2 MFC set to  0.000000
7/27/2010	8:59:55 AM	BCl3 MFC set to  0.000000
7/27/2010	8:59:55 AM	PHl3 MFC set to  0.000000
7/27/2010	8:59:55 AM	SiCl4 MFC set to  0.000000
7/27/2010	8:59:55 AM	Tube furnace set to 0
7/27/2010	8:59:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/27/2010	8:59:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	8:59:58 AM	Recipe started at 8:59 AM
7/27/2010	8:59:58 AM	Helium valve closed
7/27/2010	8:59:58 AM	H2 valve closed
7/27/2010	8:59:58 AM	BCl3 valve closed
7/27/2010	8:59:58 AM	PH3 valve closed
7/27/2010	8:59:58 AM	SiCl4 pre valve closed
7/27/2010	8:59:58 AM	SiCl4 post valve closed
7/27/2010	8:59:58 AM	Main Vac valve closed
7/27/2010	8:59:58 AM	Bubbler valve closed
7/27/2010	8:59:58 AM	Bypass valve opened
7/27/2010	8:59:58 AM	Helium MFC set to  0.000000
7/27/2010	8:59:58 AM	H2 MFC set to  0.000000
7/27/2010	8:59:58 AM	BCl3 MFC set to  0.000000
7/27/2010	8:59:58 AM	PHl3 MFC set to  0.000000
7/27/2010	8:59:58 AM	SiCl4 MFC set to  0.000000
7/27/2010	8:59:58 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	8:59:59 AM	Tube furnace set to 0
7/27/2010	9:00:01 AM	Helium valve closed
7/27/2010	9:00:01 AM	H2 valve closed
7/27/2010	9:00:01 AM	BCl3 valve closed
7/27/2010	9:00:01 AM	PH3 valve closed
7/27/2010	9:00:01 AM	SiCl4 pre valve closed
7/27/2010	9:00:01 AM	SiCl4 post valve closed
7/27/2010	9:00:01 AM	Bubbler valve closed
7/27/2010	9:00:01 AM	Main Vac valve opened
7/27/2010	9:00:01 AM	Bypass valve opened
7/27/2010	9:00:01 AM	Helium MFC set to  0.000000
7/27/2010	9:00:01 AM	H2 MFC set to  0.000000
7/27/2010	9:00:01 AM	BCl3 MFC set to  0.000000
7/27/2010	9:00:01 AM	PHl3 MFC set to  0.000000
7/27/2010	9:00:01 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:00:01 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:00:01 AM	Tube furnace set to 0
7/27/2010	9:00:01 AM	Run finished at 9:00 AM
7/27/2010	9:00:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	9:00:16 AM	Bypass valve closed
7/27/2010	9:00:17 AM	Main Vac valve closed
7/27/2010	9:01:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/27/2010	9:01:34 AM	Recipe started at 9:01 AM
7/27/2010	9:01:34 AM	H2 valve closed
7/27/2010	9:01:34 AM	BCl3 valve closed
7/27/2010	9:01:34 AM	PH3 valve closed
7/27/2010	9:01:34 AM	SiCl4 pre valve closed
7/27/2010	9:01:34 AM	SiCl4 post valve closed
7/27/2010	9:01:34 AM	Main Vac valve closed
7/27/2010	9:01:34 AM	Bypass valve closed
7/27/2010	9:01:34 AM	Bubbler valve closed
7/27/2010	9:01:34 AM	Helium valve opened
7/27/2010	9:01:34 AM	Helium MFC set to  500.000000
7/27/2010	9:01:34 AM	H2 MFC set to  0.000000
7/27/2010	9:01:34 AM	BCl3 MFC set to  0.000000
7/27/2010	9:01:34 AM	PHl3 MFC set to  0.000000
7/27/2010	9:01:34 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:01:34 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:01:34 AM	Tube furnace set to 0
7/27/2010	9:02:55 AM	Helium valve closed
7/27/2010	9:02:55 AM	H2 valve closed
7/27/2010	9:02:55 AM	BCl3 valve closed
7/27/2010	9:02:55 AM	PH3 valve closed
7/27/2010	9:02:55 AM	SiCl4 pre valve closed
7/27/2010	9:02:55 AM	SiCl4 post valve closed
7/27/2010	9:02:55 AM	Main Vac valve closed
7/27/2010	9:02:55 AM	Bypass valve closed
7/27/2010	9:02:55 AM	Bubbler valve closed
7/27/2010	9:02:55 AM	Helium MFC set to  0.000000
7/27/2010	9:02:55 AM	H2 MFC set to  0.000000
7/27/2010	9:02:55 AM	BCl3 MFC set to  0.000000
7/27/2010	9:02:55 AM	PHl3 MFC set to  0.000000
7/27/2010	9:02:55 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:02:55 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:02:56 AM	Tube furnace set to 0
7/27/2010	9:03:11 AM	Helium valve closed
7/27/2010	9:03:11 AM	H2 valve closed
7/27/2010	9:03:11 AM	BCl3 valve closed
7/27/2010	9:03:11 AM	PH3 valve closed
7/27/2010	9:03:11 AM	SiCl4 pre valve closed
7/27/2010	9:03:11 AM	SiCl4 post valve closed
7/27/2010	9:03:11 AM	Main Vac valve closed
7/27/2010	9:03:11 AM	Bubbler valve closed
7/27/2010	9:03:11 AM	Bypass valve opened
7/27/2010	9:03:11 AM	Helium MFC set to  0.000000
7/27/2010	9:03:11 AM	H2 MFC set to  0.000000
7/27/2010	9:03:11 AM	BCl3 MFC set to  0.000000
7/27/2010	9:03:11 AM	PHl3 MFC set to  0.000000
7/27/2010	9:03:11 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:03:11 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:03:11 AM	Tube furnace set to 0
7/27/2010	9:03:37 AM	Helium valve closed
7/27/2010	9:03:37 AM	H2 valve closed
7/27/2010	9:03:37 AM	BCl3 valve closed
7/27/2010	9:03:37 AM	PH3 valve closed
7/27/2010	9:03:37 AM	SiCl4 pre valve closed
7/27/2010	9:03:37 AM	SiCl4 post valve closed
7/27/2010	9:03:37 AM	Bubbler valve closed
7/27/2010	9:03:37 AM	Main Vac valve opened
7/27/2010	9:03:37 AM	Bypass valve opened
7/27/2010	9:03:37 AM	Helium MFC set to  0.000000
7/27/2010	9:03:37 AM	H2 MFC set to  0.000000
7/27/2010	9:03:37 AM	BCl3 MFC set to  0.000000
7/27/2010	9:03:37 AM	PHl3 MFC set to  0.000000
7/27/2010	9:03:37 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:03:37 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:03:37 AM	Tube furnace set to 0
7/27/2010	9:08:37 AM	H2 valve closed
7/27/2010	9:08:37 AM	BCl3 valve closed
7/27/2010	9:08:37 AM	PH3 valve closed
7/27/2010	9:08:37 AM	SiCl4 pre valve closed
7/27/2010	9:08:37 AM	SiCl4 post valve closed
7/27/2010	9:08:37 AM	Main Vac valve closed
7/27/2010	9:08:37 AM	Bypass valve closed
7/27/2010	9:08:37 AM	Bubbler valve closed
7/27/2010	9:08:37 AM	Helium valve opened
7/27/2010	9:08:37 AM	Helium MFC set to  500.000000
7/27/2010	9:08:37 AM	H2 MFC set to  0.000000
7/27/2010	9:08:37 AM	BCl3 MFC set to  0.000000
7/27/2010	9:08:37 AM	PHl3 MFC set to  0.000000
7/27/2010	9:08:37 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:08:37 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:08:37 AM	Tube furnace set to 0
7/27/2010	9:09:59 AM	Helium valve closed
7/27/2010	9:09:59 AM	H2 valve closed
7/27/2010	9:09:59 AM	BCl3 valve closed
7/27/2010	9:09:59 AM	PH3 valve closed
7/27/2010	9:09:59 AM	SiCl4 pre valve closed
7/27/2010	9:09:59 AM	SiCl4 post valve closed
7/27/2010	9:09:59 AM	Main Vac valve closed
7/27/2010	9:09:59 AM	Bypass valve closed
7/27/2010	9:09:59 AM	Bubbler valve closed
7/27/2010	9:09:59 AM	Helium MFC set to  0.000000
7/27/2010	9:09:59 AM	H2 MFC set to  0.000000
7/27/2010	9:09:59 AM	BCl3 MFC set to  0.000000
7/27/2010	9:09:59 AM	PHl3 MFC set to  0.000000
7/27/2010	9:09:59 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:09:59 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:09:59 AM	Tube furnace set to 0
7/27/2010	9:10:14 AM	Helium valve closed
7/27/2010	9:10:14 AM	H2 valve closed
7/27/2010	9:10:14 AM	BCl3 valve closed
7/27/2010	9:10:14 AM	PH3 valve closed
7/27/2010	9:10:14 AM	SiCl4 pre valve closed
7/27/2010	9:10:14 AM	SiCl4 post valve closed
7/27/2010	9:10:14 AM	Main Vac valve closed
7/27/2010	9:10:14 AM	Bubbler valve closed
7/27/2010	9:10:14 AM	Bypass valve opened
7/27/2010	9:10:14 AM	Helium MFC set to  0.000000
7/27/2010	9:10:14 AM	H2 MFC set to  0.000000
7/27/2010	9:10:14 AM	BCl3 MFC set to  0.000000
7/27/2010	9:10:14 AM	PHl3 MFC set to  0.000000
7/27/2010	9:10:14 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:10:14 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:10:14 AM	Tube furnace set to 0
7/27/2010	9:10:40 AM	Helium valve closed
7/27/2010	9:10:40 AM	H2 valve closed
7/27/2010	9:10:40 AM	BCl3 valve closed
7/27/2010	9:10:40 AM	PH3 valve closed
7/27/2010	9:10:40 AM	SiCl4 pre valve closed
7/27/2010	9:10:40 AM	SiCl4 post valve closed
7/27/2010	9:10:40 AM	Bubbler valve closed
7/27/2010	9:10:40 AM	Main Vac valve opened
7/27/2010	9:10:40 AM	Bypass valve opened
7/27/2010	9:10:40 AM	Helium MFC set to  0.000000
7/27/2010	9:10:40 AM	H2 MFC set to  0.000000
7/27/2010	9:10:40 AM	BCl3 MFC set to  0.000000
7/27/2010	9:10:40 AM	PHl3 MFC set to  0.000000
7/27/2010	9:10:40 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:10:40 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:10:40 AM	Tube furnace set to 0
7/27/2010	9:15:40 AM	H2 valve closed
7/27/2010	9:15:40 AM	BCl3 valve closed
7/27/2010	9:15:40 AM	PH3 valve closed
7/27/2010	9:15:40 AM	SiCl4 pre valve closed
7/27/2010	9:15:40 AM	SiCl4 post valve closed
7/27/2010	9:15:40 AM	Main Vac valve closed
7/27/2010	9:15:40 AM	Bypass valve closed
7/27/2010	9:15:40 AM	Bubbler valve closed
7/27/2010	9:15:40 AM	Helium valve opened
7/27/2010	9:15:40 AM	Helium MFC set to  500.000000
7/27/2010	9:15:40 AM	H2 MFC set to  0.000000
7/27/2010	9:15:40 AM	BCl3 MFC set to  0.000000
7/27/2010	9:15:40 AM	PHl3 MFC set to  0.000000
7/27/2010	9:15:40 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:15:40 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:15:40 AM	Tube furnace set to 0
7/27/2010	9:17:02 AM	Helium valve closed
7/27/2010	9:17:02 AM	H2 valve closed
7/27/2010	9:17:02 AM	BCl3 valve closed
7/27/2010	9:17:02 AM	PH3 valve closed
7/27/2010	9:17:02 AM	SiCl4 pre valve closed
7/27/2010	9:17:02 AM	SiCl4 post valve closed
7/27/2010	9:17:02 AM	Main Vac valve closed
7/27/2010	9:17:02 AM	Bypass valve closed
7/27/2010	9:17:02 AM	Bubbler valve closed
7/27/2010	9:17:02 AM	Helium MFC set to  0.000000
7/27/2010	9:17:02 AM	H2 MFC set to  0.000000
7/27/2010	9:17:02 AM	BCl3 MFC set to  0.000000
7/27/2010	9:17:02 AM	PHl3 MFC set to  0.000000
7/27/2010	9:17:02 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:17:02 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:17:02 AM	Tube furnace set to 0
7/27/2010	9:17:17 AM	Helium valve closed
7/27/2010	9:17:17 AM	H2 valve closed
7/27/2010	9:17:17 AM	BCl3 valve closed
7/27/2010	9:17:17 AM	PH3 valve closed
7/27/2010	9:17:17 AM	SiCl4 pre valve closed
7/27/2010	9:17:17 AM	SiCl4 post valve closed
7/27/2010	9:17:17 AM	Main Vac valve closed
7/27/2010	9:17:17 AM	Bubbler valve closed
7/27/2010	9:17:17 AM	Bypass valve opened
7/27/2010	9:17:17 AM	Helium MFC set to  0.000000
7/27/2010	9:17:17 AM	H2 MFC set to  0.000000
7/27/2010	9:17:17 AM	BCl3 MFC set to  0.000000
7/27/2010	9:17:17 AM	PHl3 MFC set to  0.000000
7/27/2010	9:17:17 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:17:17 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:17:17 AM	Tube furnace set to 0
7/27/2010	9:17:44 AM	Helium valve closed
7/27/2010	9:17:44 AM	H2 valve closed
7/27/2010	9:17:44 AM	BCl3 valve closed
7/27/2010	9:17:44 AM	PH3 valve closed
7/27/2010	9:17:44 AM	SiCl4 pre valve closed
7/27/2010	9:17:44 AM	SiCl4 post valve closed
7/27/2010	9:17:44 AM	Bubbler valve closed
7/27/2010	9:17:44 AM	Main Vac valve opened
7/27/2010	9:17:44 AM	Bypass valve opened
7/27/2010	9:17:44 AM	Helium MFC set to  0.000000
7/27/2010	9:17:44 AM	H2 MFC set to  0.000000
7/27/2010	9:17:44 AM	BCl3 MFC set to  0.000000
7/27/2010	9:17:44 AM	PHl3 MFC set to  0.000000
7/27/2010	9:17:44 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:17:44 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:17:44 AM	Tube furnace set to 0
7/27/2010	9:22:44 AM	Helium valve closed
7/27/2010	9:22:44 AM	H2 valve closed
7/27/2010	9:22:44 AM	BCl3 valve closed
7/27/2010	9:22:44 AM	PH3 valve closed
7/27/2010	9:22:44 AM	SiCl4 pre valve closed
7/27/2010	9:22:44 AM	SiCl4 post valve closed
7/27/2010	9:22:44 AM	Bubbler valve closed
7/27/2010	9:22:44 AM	Main Vac valve opened
7/27/2010	9:22:44 AM	Bypass valve opened
7/27/2010	9:22:44 AM	Helium MFC set to  0.000000
7/27/2010	9:22:44 AM	H2 MFC set to  0.000000
7/27/2010	9:22:44 AM	BCl3 MFC set to  0.000000
7/27/2010	9:22:44 AM	PHl3 MFC set to  0.000000
7/27/2010	9:22:44 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:22:44 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:22:44 AM	Tube furnace set to 0
7/27/2010	9:22:45 AM	Run finished at 9:22 AM
7/27/2010	9:22:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/27/2010	9:27:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	9:27:35 AM	Recipe started at 9:27 AM
7/27/2010	9:27:35 AM	Helium valve closed
7/27/2010	9:27:35 AM	H2 valve closed
7/27/2010	9:27:35 AM	BCl3 valve closed
7/27/2010	9:27:35 AM	PH3 valve closed
7/27/2010	9:27:35 AM	SiCl4 pre valve closed
7/27/2010	9:27:35 AM	SiCl4 post valve closed
7/27/2010	9:27:35 AM	Main Vac valve closed
7/27/2010	9:27:35 AM	Bubbler valve closed
7/27/2010	9:27:35 AM	Bypass valve opened
7/27/2010	9:27:35 AM	Helium MFC set to  0.000000
7/27/2010	9:27:35 AM	H2 MFC set to  0.000000
7/27/2010	9:27:36 AM	BCl3 MFC set to  0.000000
7/27/2010	9:27:36 AM	PHl3 MFC set to  0.000000
7/27/2010	9:27:36 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:27:36 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:27:36 AM	Tube furnace set to 0
7/27/2010	9:27:36 AM	Helium valve closed
7/27/2010	9:27:36 AM	H2 valve closed
7/27/2010	9:27:36 AM	BCl3 valve closed
7/27/2010	9:27:36 AM	PH3 valve closed
7/27/2010	9:27:36 AM	SiCl4 pre valve closed
7/27/2010	9:27:36 AM	SiCl4 post valve closed
7/27/2010	9:27:36 AM	Bubbler valve closed
7/27/2010	9:27:36 AM	Main Vac valve opened
7/27/2010	9:27:36 AM	Bypass valve opened
7/27/2010	9:27:36 AM	Helium MFC set to  0.000000
7/27/2010	9:27:36 AM	H2 MFC set to  0.000000
7/27/2010	9:27:36 AM	BCl3 MFC set to  0.000000
7/27/2010	9:27:36 AM	PHl3 MFC set to  0.000000
7/27/2010	9:27:36 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:27:36 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:27:36 AM	Tube furnace set to 0
7/27/2010	9:28:36 AM	H2 valve closed
7/27/2010	9:28:36 AM	BCl3 valve closed
7/27/2010	9:28:36 AM	PH3 valve closed
7/27/2010	9:28:36 AM	SiCl4 pre valve closed
7/27/2010	9:28:36 AM	SiCl4 post valve closed
7/27/2010	9:28:36 AM	Bubbler valve closed
7/27/2010	9:28:36 AM	Helium valve opened
7/27/2010	9:28:36 AM	Main Vac valve opened
7/27/2010	9:28:36 AM	Bypass valve opened
7/27/2010	9:28:36 AM	Helium MFC set to  100.000000
7/27/2010	9:28:36 AM	H2 MFC set to  0.000000
7/27/2010	9:28:36 AM	BCl3 MFC set to  0.000000
7/27/2010	9:28:36 AM	PHl3 MFC set to  0.000000
7/27/2010	9:28:36 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:28:36 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:28:36 AM	Tube furnace set to 0
7/27/2010	9:37:36 AM	Helium valve closed
7/27/2010	9:37:36 AM	H2 valve closed
7/27/2010	9:37:36 AM	BCl3 valve closed
7/27/2010	9:37:36 AM	PH3 valve closed
7/27/2010	9:37:36 AM	SiCl4 pre valve closed
7/27/2010	9:37:36 AM	SiCl4 post valve closed
7/27/2010	9:37:36 AM	Bubbler valve closed
7/27/2010	9:37:36 AM	Main Vac valve opened
7/27/2010	9:37:36 AM	Bypass valve opened
7/27/2010	9:37:36 AM	Helium MFC set to  0.000000
7/27/2010	9:37:36 AM	H2 MFC set to  0.000000
7/27/2010	9:37:36 AM	BCl3 MFC set to  0.000000
7/27/2010	9:37:36 AM	PHl3 MFC set to  0.000000
7/27/2010	9:37:36 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:37:36 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:37:36 AM	Tube furnace set to 0
7/27/2010	9:38:36 AM	H2 valve closed
7/27/2010	9:38:36 AM	BCl3 valve closed
7/27/2010	9:38:36 AM	PH3 valve closed
7/27/2010	9:38:36 AM	SiCl4 pre valve closed
7/27/2010	9:38:36 AM	SiCl4 post valve closed
7/27/2010	9:38:37 AM	Bubbler valve closed
7/27/2010	9:38:37 AM	Helium valve opened
7/27/2010	9:38:37 AM	Main Vac valve opened
7/27/2010	9:38:37 AM	Bypass valve opened
7/27/2010	9:38:37 AM	Helium MFC set to  100.000000
7/27/2010	9:38:37 AM	H2 MFC set to  0.000000
7/27/2010	9:38:37 AM	BCl3 MFC set to  0.000000
7/27/2010	9:38:37 AM	PHl3 MFC set to  0.000000
7/27/2010	9:38:37 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:38:37 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:38:37 AM	Tube furnace set to 0
7/27/2010	9:47:37 AM	Helium valve closed
7/27/2010	9:47:37 AM	H2 valve closed
7/27/2010	9:47:37 AM	BCl3 valve closed
7/27/2010	9:47:37 AM	PH3 valve closed
7/27/2010	9:47:37 AM	SiCl4 pre valve closed
7/27/2010	9:47:37 AM	SiCl4 post valve closed
7/27/2010	9:47:37 AM	Bubbler valve closed
7/27/2010	9:47:37 AM	Main Vac valve opened
7/27/2010	9:47:37 AM	Bypass valve opened
7/27/2010	9:47:37 AM	Helium MFC set to  0.000000
7/27/2010	9:47:37 AM	H2 MFC set to  0.000000
7/27/2010	9:47:37 AM	BCl3 MFC set to  0.000000
7/27/2010	9:47:37 AM	PHl3 MFC set to  0.000000
7/27/2010	9:47:37 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:47:37 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:47:37 AM	Tube furnace set to 0
7/27/2010	9:48:37 AM	H2 valve closed
7/27/2010	9:48:37 AM	BCl3 valve closed
7/27/2010	9:48:37 AM	PH3 valve closed
7/27/2010	9:48:37 AM	SiCl4 pre valve closed
7/27/2010	9:48:37 AM	SiCl4 post valve closed
7/27/2010	9:48:37 AM	Bubbler valve closed
7/27/2010	9:48:37 AM	Helium valve opened
7/27/2010	9:48:37 AM	Main Vac valve opened
7/27/2010	9:48:37 AM	Bypass valve opened
7/27/2010	9:48:37 AM	Helium MFC set to  100.000000
7/27/2010	9:48:37 AM	H2 MFC set to  0.000000
7/27/2010	9:48:37 AM	BCl3 MFC set to  0.000000
7/27/2010	9:48:37 AM	PHl3 MFC set to  0.000000
7/27/2010	9:48:37 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:48:37 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:48:37 AM	Tube furnace set to 0
7/27/2010	9:57:37 AM	Helium valve closed
7/27/2010	9:57:37 AM	H2 valve closed
7/27/2010	9:57:37 AM	BCl3 valve closed
7/27/2010	9:57:37 AM	PH3 valve closed
7/27/2010	9:57:37 AM	SiCl4 pre valve closed
7/27/2010	9:57:37 AM	SiCl4 post valve closed
7/27/2010	9:57:37 AM	Bubbler valve closed
7/27/2010	9:57:37 AM	Main Vac valve opened
7/27/2010	9:57:37 AM	Bypass valve opened
7/27/2010	9:57:37 AM	Helium MFC set to  0.000000
7/27/2010	9:57:37 AM	H2 MFC set to  0.000000
7/27/2010	9:57:37 AM	BCl3 MFC set to  0.000000
7/27/2010	9:57:37 AM	PHl3 MFC set to  0.000000
7/27/2010	9:57:37 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:57:37 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:57:37 AM	Tube furnace set to 0
7/27/2010	9:57:38 AM	Run finished at 9:57 AM
7/27/2010	9:57:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	9:58:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	9:58:10 AM	Recipe started at 9:58 AM
7/27/2010	9:58:10 AM	Helium valve closed
7/27/2010	9:58:10 AM	H2 valve closed
7/27/2010	9:58:10 AM	BCl3 valve closed
7/27/2010	9:58:10 AM	PH3 valve closed
7/27/2010	9:58:10 AM	SiCl4 pre valve closed
7/27/2010	9:58:10 AM	SiCl4 post valve closed
7/27/2010	9:58:10 AM	Main Vac valve closed
7/27/2010	9:58:10 AM	Bubbler valve closed
7/27/2010	9:58:10 AM	Bypass valve opened
7/27/2010	9:58:10 AM	Helium MFC set to  0.000000
7/27/2010	9:58:10 AM	H2 MFC set to  0.000000
7/27/2010	9:58:10 AM	BCl3 MFC set to  0.000000
7/27/2010	9:58:10 AM	PHl3 MFC set to  0.000000
7/27/2010	9:58:10 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:58:10 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:58:10 AM	Tube furnace set to 0
7/27/2010	9:58:10 AM	Helium valve closed
7/27/2010	9:58:10 AM	H2 valve closed
7/27/2010	9:58:10 AM	BCl3 valve closed
7/27/2010	9:58:10 AM	PH3 valve closed
7/27/2010	9:58:10 AM	SiCl4 pre valve closed
7/27/2010	9:58:10 AM	SiCl4 post valve closed
7/27/2010	9:58:10 AM	Bubbler valve closed
7/27/2010	9:58:10 AM	Main Vac valve opened
7/27/2010	9:58:10 AM	Bypass valve opened
7/27/2010	9:58:10 AM	Helium MFC set to  0.000000
7/27/2010	9:58:10 AM	H2 MFC set to  0.000000
7/27/2010	9:58:10 AM	BCl3 MFC set to  0.000000
7/27/2010	9:58:10 AM	PHl3 MFC set to  0.000000
7/27/2010	9:58:10 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:58:10 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:58:10 AM	Tube furnace set to 0
7/27/2010	9:59:10 AM	H2 valve closed
7/27/2010	9:59:10 AM	BCl3 valve closed
7/27/2010	9:59:10 AM	PH3 valve closed
7/27/2010	9:59:10 AM	SiCl4 pre valve closed
7/27/2010	9:59:10 AM	SiCl4 post valve closed
7/27/2010	9:59:10 AM	Bubbler valve closed
7/27/2010	9:59:10 AM	Helium valve opened
7/27/2010	9:59:10 AM	Main Vac valve opened
7/27/2010	9:59:10 AM	Bypass valve opened
7/27/2010	9:59:10 AM	Helium MFC set to  100.000000
7/27/2010	9:59:10 AM	H2 MFC set to  0.000000
7/27/2010	9:59:10 AM	BCl3 MFC set to  0.000000
7/27/2010	9:59:10 AM	PHl3 MFC set to  0.000000
7/27/2010	9:59:10 AM	SiCl4 MFC set to  0.000000
7/27/2010	9:59:10 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	9:59:10 AM	Tube furnace set to 0
7/27/2010	10:08:10 AM	Helium valve closed
7/27/2010	10:08:10 AM	H2 valve closed
7/27/2010	10:08:10 AM	BCl3 valve closed
7/27/2010	10:08:10 AM	PH3 valve closed
7/27/2010	10:08:10 AM	SiCl4 pre valve closed
7/27/2010	10:08:10 AM	SiCl4 post valve closed
7/27/2010	10:08:10 AM	Bubbler valve closed
7/27/2010	10:08:10 AM	Main Vac valve opened
7/27/2010	10:08:10 AM	Bypass valve opened
7/27/2010	10:08:10 AM	Helium MFC set to  0.000000
7/27/2010	10:08:10 AM	H2 MFC set to  0.000000
7/27/2010	10:08:10 AM	BCl3 MFC set to  0.000000
7/27/2010	10:08:10 AM	PHl3 MFC set to  0.000000
7/27/2010	10:08:10 AM	SiCl4 MFC set to  0.000000
7/27/2010	10:08:10 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	10:08:11 AM	Tube furnace set to 0
7/27/2010	10:09:11 AM	H2 valve closed
7/27/2010	10:09:11 AM	BCl3 valve closed
7/27/2010	10:09:11 AM	PH3 valve closed
7/27/2010	10:09:11 AM	SiCl4 pre valve closed
7/27/2010	10:09:11 AM	SiCl4 post valve closed
7/27/2010	10:09:11 AM	Bubbler valve closed
7/27/2010	10:09:11 AM	Helium valve opened
7/27/2010	10:09:11 AM	Main Vac valve opened
7/27/2010	10:09:11 AM	Bypass valve opened
7/27/2010	10:09:11 AM	Helium MFC set to  100.000000
7/27/2010	10:09:11 AM	H2 MFC set to  0.000000
7/27/2010	10:09:11 AM	BCl3 MFC set to  0.000000
7/27/2010	10:09:11 AM	PHl3 MFC set to  0.000000
7/27/2010	10:09:11 AM	SiCl4 MFC set to  0.000000
7/27/2010	10:09:11 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	10:09:11 AM	Tube furnace set to 0
7/27/2010	10:18:11 AM	Helium valve closed
7/27/2010	10:18:11 AM	H2 valve closed
7/27/2010	10:18:11 AM	BCl3 valve closed
7/27/2010	10:18:11 AM	PH3 valve closed
7/27/2010	10:18:11 AM	SiCl4 pre valve closed
7/27/2010	10:18:11 AM	SiCl4 post valve closed
7/27/2010	10:18:11 AM	Bubbler valve closed
7/27/2010	10:18:11 AM	Main Vac valve opened
7/27/2010	10:18:11 AM	Bypass valve opened
7/27/2010	10:18:11 AM	Helium MFC set to  0.000000
7/27/2010	10:18:11 AM	H2 MFC set to  0.000000
7/27/2010	10:18:11 AM	BCl3 MFC set to  0.000000
7/27/2010	10:18:11 AM	PHl3 MFC set to  0.000000
7/27/2010	10:18:11 AM	SiCl4 MFC set to  0.000000
7/27/2010	10:18:11 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	10:18:11 AM	Tube furnace set to 0
7/27/2010	10:19:11 AM	H2 valve closed
7/27/2010	10:19:11 AM	BCl3 valve closed
7/27/2010	10:19:11 AM	PH3 valve closed
7/27/2010	10:19:11 AM	SiCl4 pre valve closed
7/27/2010	10:19:11 AM	SiCl4 post valve closed
7/27/2010	10:19:11 AM	Bubbler valve closed
7/27/2010	10:19:11 AM	Helium valve opened
7/27/2010	10:19:11 AM	Main Vac valve opened
7/27/2010	10:19:11 AM	Bypass valve opened
7/27/2010	10:19:11 AM	Helium MFC set to  100.000000
7/27/2010	10:19:11 AM	H2 MFC set to  0.000000
7/27/2010	10:19:11 AM	BCl3 MFC set to  0.000000
7/27/2010	10:19:11 AM	PHl3 MFC set to  0.000000
7/27/2010	10:19:11 AM	SiCl4 MFC set to  0.000000
7/27/2010	10:19:11 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	10:19:11 AM	Tube furnace set to 0
7/27/2010	10:28:11 AM	Helium valve closed
7/27/2010	10:28:11 AM	H2 valve closed
7/27/2010	10:28:11 AM	BCl3 valve closed
7/27/2010	10:28:11 AM	PH3 valve closed
7/27/2010	10:28:11 AM	SiCl4 pre valve closed
7/27/2010	10:28:11 AM	SiCl4 post valve closed
7/27/2010	10:28:11 AM	Bubbler valve closed
7/27/2010	10:28:11 AM	Main Vac valve opened
7/27/2010	10:28:11 AM	Bypass valve opened
7/27/2010	10:28:11 AM	Helium MFC set to  0.000000
7/27/2010	10:28:11 AM	H2 MFC set to  0.000000
7/27/2010	10:28:11 AM	BCl3 MFC set to  0.000000
7/27/2010	10:28:11 AM	PHl3 MFC set to  0.000000
7/27/2010	10:28:11 AM	SiCl4 MFC set to  0.000000
7/27/2010	10:28:11 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	10:28:11 AM	Tube furnace set to 0
7/27/2010	10:28:12 AM	Run finished at 10:28 AM
7/27/2010	10:28:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	10:55:11 AM	Recipe started at 10:55 AM
7/27/2010	10:55:11 AM	Helium valve closed
7/27/2010	10:55:11 AM	BCl3 valve closed
7/27/2010	10:55:11 AM	PH3 valve closed
7/27/2010	10:55:11 AM	SiCl4 pre valve closed
7/27/2010	10:55:11 AM	SiCl4 post valve closed
7/27/2010	10:55:11 AM	Main Vac valve closed
7/27/2010	10:55:11 AM	Bypass valve closed
7/27/2010	10:55:11 AM	Bubbler valve closed
7/27/2010	10:55:11 AM	H2 valve opened
7/27/2010	10:55:11 AM	Helium MFC set to  0.000000
7/27/2010	10:55:11 AM	H2 MFC set to  500.000000
7/27/2010	10:55:11 AM	BCl3 MFC set to  0.000000
7/27/2010	10:55:11 AM	PHl3 MFC set to  0.000000
7/27/2010	10:55:11 AM	SiCl4 MFC set to  0.000000
7/27/2010	10:55:11 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	10:55:11 AM	Tube furnace set to 0
7/27/2010	10:56:34 AM	Helium valve closed
7/27/2010	10:56:34 AM	BCl3 valve closed
7/27/2010	10:56:34 AM	PH3 valve closed
7/27/2010	10:56:34 AM	SiCl4 pre valve closed
7/27/2010	10:56:34 AM	SiCl4 post valve closed
7/27/2010	10:56:34 AM	Main Vac valve closed
7/27/2010	10:56:34 AM	Bypass valve closed
7/27/2010	10:56:34 AM	H2 valve opened
7/27/2010	10:56:34 AM	Bubbler valve opened
7/27/2010	10:56:34 AM	Helium MFC set to  0.000000
7/27/2010	10:56:34 AM	H2 MFC set to  500.000000
7/27/2010	10:56:34 AM	BCl3 MFC set to  0.000000
7/27/2010	10:56:34 AM	PHl3 MFC set to  0.000000
7/27/2010	10:56:34 AM	SiCl4 MFC set to  0.000000
7/27/2010	10:56:34 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	10:56:34 AM	Tube furnace set to 1000
7/27/2010	11:16:34 AM	Helium valve closed
7/27/2010	11:16:34 AM	PH3 valve closed
7/27/2010	11:16:34 AM	Main Vac valve closed
7/27/2010	11:16:34 AM	Bypass valve closed
7/27/2010	11:16:34 AM	H2 valve opened
7/27/2010	11:16:34 AM	BCl3 valve opened
7/27/2010	11:16:34 AM	SiCl4 pre valve opened
7/27/2010	11:16:34 AM	SiCl4 post valve opened
7/27/2010	11:16:34 AM	Bubbler valve opened
7/27/2010	11:16:34 AM	Helium MFC set to  0.000000
7/27/2010	11:16:34 AM	H2 MFC set to  500.000000
7/27/2010	11:16:34 AM	BCl3 MFC set to  6.000000
7/27/2010	11:16:34 AM	PHl3 MFC set to  0.000000
7/27/2010	11:16:34 AM	SiCl4 MFC set to  50.000000
7/27/2010	11:16:34 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	11:16:34 AM	Tube furnace set to 1000
7/27/2010	11:36:34 AM	H2 valve closed
7/27/2010	11:36:34 AM	BCl3 valve closed
7/27/2010	11:36:34 AM	PH3 valve closed
7/27/2010	11:36:34 AM	SiCl4 pre valve closed
7/27/2010	11:36:34 AM	SiCl4 post valve closed
7/27/2010	11:36:34 AM	Main Vac valve closed
7/27/2010	11:36:34 AM	Bypass valve closed
7/27/2010	11:36:34 AM	Helium valve opened
7/27/2010	11:36:34 AM	Bubbler valve opened
7/27/2010	11:36:34 AM	Helium MFC set to  500.000000
7/27/2010	11:36:34 AM	H2 MFC set to  0.000000
7/27/2010	11:36:34 AM	BCl3 MFC set to  0.000000
7/27/2010	11:36:34 AM	PHl3 MFC set to  0.000000
7/27/2010	11:36:34 AM	SiCl4 MFC set to  0.000000
7/27/2010	11:36:34 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	11:36:34 AM	Tube furnace set to 0
7/27/2010	11:56:34 AM	Helium valve closed
7/27/2010	11:56:34 AM	H2 valve closed
7/27/2010	11:56:34 AM	BCl3 valve closed
7/27/2010	11:56:34 AM	PH3 valve closed
7/27/2010	11:56:34 AM	SiCl4 pre valve closed
7/27/2010	11:56:34 AM	SiCl4 post valve closed
7/27/2010	11:56:34 AM	Main Vac valve closed
7/27/2010	11:56:34 AM	Bypass valve closed
7/27/2010	11:56:34 AM	Bubbler valve closed
7/27/2010	11:56:34 AM	Helium MFC set to  0.000000
7/27/2010	11:56:34 AM	H2 MFC set to  0.000000
7/27/2010	11:56:34 AM	BCl3 MFC set to  0.000000
7/27/2010	11:56:34 AM	PHl3 MFC set to  0.000000
7/27/2010	11:56:34 AM	SiCl4 MFC set to  0.000000
7/27/2010	11:56:34 AM	Bypass solenoid MFC set to  0.000000
7/27/2010	11:56:34 AM	Tube furnace set to 0
7/27/2010	11:56:35 AM	Run finished at 11:56 AM
7/27/2010	12:07:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/27/2010	12:07:07 PM	Recipe started at 12:07 PM
7/27/2010	12:07:08 PM	H2 valve closed
7/27/2010	12:07:08 PM	BCl3 valve closed
7/27/2010	12:07:08 PM	PH3 valve closed
7/27/2010	12:07:08 PM	SiCl4 pre valve closed
7/27/2010	12:07:08 PM	SiCl4 post valve closed
7/27/2010	12:07:08 PM	Main Vac valve closed
7/27/2010	12:07:08 PM	Bypass valve closed
7/27/2010	12:07:08 PM	Bubbler valve closed
7/27/2010	12:07:08 PM	Helium valve opened
7/27/2010	12:07:08 PM	Helium MFC set to  500.000000
7/27/2010	12:07:08 PM	H2 MFC set to  0.000000
7/27/2010	12:07:08 PM	BCl3 MFC set to  0.000000
7/27/2010	12:07:08 PM	PHl3 MFC set to  0.000000
7/27/2010	12:07:08 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:07:08 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:07:08 PM	Tube furnace set to 0
7/27/2010	12:07:09 PM	Helium valve closed
7/27/2010	12:07:09 PM	H2 valve closed
7/27/2010	12:07:09 PM	BCl3 valve closed
7/27/2010	12:07:09 PM	PH3 valve closed
7/27/2010	12:07:09 PM	SiCl4 pre valve closed
7/27/2010	12:07:09 PM	SiCl4 post valve closed
7/27/2010	12:07:09 PM	Main Vac valve closed
7/27/2010	12:07:09 PM	Bypass valve closed
7/27/2010	12:07:09 PM	Bubbler valve closed
7/27/2010	12:07:09 PM	Helium MFC set to  0.000000
7/27/2010	12:07:09 PM	H2 MFC set to  0.000000
7/27/2010	12:07:09 PM	BCl3 MFC set to  0.000000
7/27/2010	12:07:09 PM	PHl3 MFC set to  0.000000
7/27/2010	12:07:09 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:07:09 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:07:09 PM	Tube furnace set to 0
7/27/2010	12:07:24 PM	Helium valve closed
7/27/2010	12:07:24 PM	H2 valve closed
7/27/2010	12:07:24 PM	BCl3 valve closed
7/27/2010	12:07:24 PM	PH3 valve closed
7/27/2010	12:07:24 PM	SiCl4 pre valve closed
7/27/2010	12:07:24 PM	SiCl4 post valve closed
7/27/2010	12:07:24 PM	Main Vac valve closed
7/27/2010	12:07:24 PM	Bubbler valve closed
7/27/2010	12:07:24 PM	Bypass valve opened
7/27/2010	12:07:24 PM	Helium MFC set to  0.000000
7/27/2010	12:07:24 PM	H2 MFC set to  0.000000
7/27/2010	12:07:24 PM	BCl3 MFC set to  0.000000
7/27/2010	12:07:24 PM	PHl3 MFC set to  0.000000
7/27/2010	12:07:24 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:07:24 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:07:25 PM	Tube furnace set to 0
7/27/2010	12:08:00 PM	Helium valve closed
7/27/2010	12:08:00 PM	H2 valve closed
7/27/2010	12:08:00 PM	BCl3 valve closed
7/27/2010	12:08:00 PM	PH3 valve closed
7/27/2010	12:08:00 PM	SiCl4 pre valve closed
7/27/2010	12:08:00 PM	SiCl4 post valve closed
7/27/2010	12:08:00 PM	Bubbler valve closed
7/27/2010	12:08:00 PM	Main Vac valve opened
7/27/2010	12:08:00 PM	Bypass valve opened
7/27/2010	12:08:00 PM	Helium MFC set to  0.000000
7/27/2010	12:08:00 PM	H2 MFC set to  0.000000
7/27/2010	12:08:00 PM	BCl3 MFC set to  0.000000
7/27/2010	12:08:00 PM	PHl3 MFC set to  0.000000
7/27/2010	12:08:00 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:08:00 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:08:01 PM	Tube furnace set to 0
7/27/2010	12:13:01 PM	H2 valve closed
7/27/2010	12:13:01 PM	BCl3 valve closed
7/27/2010	12:13:01 PM	PH3 valve closed
7/27/2010	12:13:01 PM	SiCl4 pre valve closed
7/27/2010	12:13:01 PM	SiCl4 post valve closed
7/27/2010	12:13:01 PM	Main Vac valve closed
7/27/2010	12:13:01 PM	Bypass valve closed
7/27/2010	12:13:01 PM	Bubbler valve closed
7/27/2010	12:13:01 PM	Helium valve opened
7/27/2010	12:13:01 PM	Helium MFC set to  500.000000
7/27/2010	12:13:01 PM	H2 MFC set to  0.000000
7/27/2010	12:13:01 PM	BCl3 MFC set to  0.000000
7/27/2010	12:13:01 PM	PHl3 MFC set to  0.000000
7/27/2010	12:13:01 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:13:01 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:13:01 PM	Tube furnace set to 0
7/27/2010	12:14:21 PM	Helium valve closed
7/27/2010	12:14:21 PM	H2 valve closed
7/27/2010	12:14:21 PM	BCl3 valve closed
7/27/2010	12:14:21 PM	PH3 valve closed
7/27/2010	12:14:21 PM	SiCl4 pre valve closed
7/27/2010	12:14:21 PM	SiCl4 post valve closed
7/27/2010	12:14:21 PM	Main Vac valve closed
7/27/2010	12:14:21 PM	Bypass valve closed
7/27/2010	12:14:21 PM	Bubbler valve closed
7/27/2010	12:14:21 PM	Helium MFC set to  0.000000
7/27/2010	12:14:21 PM	H2 MFC set to  0.000000
7/27/2010	12:14:21 PM	BCl3 MFC set to  0.000000
7/27/2010	12:14:21 PM	PHl3 MFC set to  0.000000
7/27/2010	12:14:21 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:14:21 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:14:21 PM	Tube furnace set to 0
7/27/2010	12:14:36 PM	Helium valve closed
7/27/2010	12:14:36 PM	H2 valve closed
7/27/2010	12:14:36 PM	BCl3 valve closed
7/27/2010	12:14:36 PM	PH3 valve closed
7/27/2010	12:14:36 PM	SiCl4 pre valve closed
7/27/2010	12:14:36 PM	SiCl4 post valve closed
7/27/2010	12:14:36 PM	Main Vac valve closed
7/27/2010	12:14:36 PM	Bubbler valve closed
7/27/2010	12:14:36 PM	Bypass valve opened
7/27/2010	12:14:36 PM	Helium MFC set to  0.000000
7/27/2010	12:14:36 PM	H2 MFC set to  0.000000
7/27/2010	12:14:36 PM	BCl3 MFC set to  0.000000
7/27/2010	12:14:36 PM	PHl3 MFC set to  0.000000
7/27/2010	12:14:36 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:14:36 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:14:36 PM	Tube furnace set to 0
7/27/2010	12:15:02 PM	Helium valve closed
7/27/2010	12:15:02 PM	H2 valve closed
7/27/2010	12:15:02 PM	BCl3 valve closed
7/27/2010	12:15:02 PM	PH3 valve closed
7/27/2010	12:15:02 PM	SiCl4 pre valve closed
7/27/2010	12:15:02 PM	SiCl4 post valve closed
7/27/2010	12:15:02 PM	Bubbler valve closed
7/27/2010	12:15:02 PM	Main Vac valve opened
7/27/2010	12:15:02 PM	Bypass valve opened
7/27/2010	12:15:02 PM	Helium MFC set to  0.000000
7/27/2010	12:15:02 PM	H2 MFC set to  0.000000
7/27/2010	12:15:02 PM	BCl3 MFC set to  0.000000
7/27/2010	12:15:02 PM	PHl3 MFC set to  0.000000
7/27/2010	12:15:02 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:15:02 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:15:02 PM	Tube furnace set to 0
7/27/2010	12:20:02 PM	H2 valve closed
7/27/2010	12:20:02 PM	BCl3 valve closed
7/27/2010	12:20:02 PM	PH3 valve closed
7/27/2010	12:20:02 PM	SiCl4 pre valve closed
7/27/2010	12:20:02 PM	SiCl4 post valve closed
7/27/2010	12:20:02 PM	Main Vac valve closed
7/27/2010	12:20:02 PM	Bypass valve closed
7/27/2010	12:20:02 PM	Bubbler valve closed
7/27/2010	12:20:02 PM	Helium valve opened
7/27/2010	12:20:02 PM	Helium MFC set to  500.000000
7/27/2010	12:20:02 PM	H2 MFC set to  0.000000
7/27/2010	12:20:02 PM	BCl3 MFC set to  0.000000
7/27/2010	12:20:02 PM	PHl3 MFC set to  0.000000
7/27/2010	12:20:02 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:20:02 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:20:03 PM	Tube furnace set to 0
7/27/2010	12:21:23 PM	Helium valve closed
7/27/2010	12:21:23 PM	H2 valve closed
7/27/2010	12:21:23 PM	BCl3 valve closed
7/27/2010	12:21:23 PM	PH3 valve closed
7/27/2010	12:21:23 PM	SiCl4 pre valve closed
7/27/2010	12:21:23 PM	SiCl4 post valve closed
7/27/2010	12:21:23 PM	Main Vac valve closed
7/27/2010	12:21:23 PM	Bypass valve closed
7/27/2010	12:21:23 PM	Bubbler valve closed
7/27/2010	12:21:23 PM	Helium MFC set to  0.000000
7/27/2010	12:21:23 PM	H2 MFC set to  0.000000
7/27/2010	12:21:23 PM	BCl3 MFC set to  0.000000
7/27/2010	12:21:23 PM	PHl3 MFC set to  0.000000
7/27/2010	12:21:23 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:21:23 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:21:23 PM	Tube furnace set to 0
7/27/2010	12:21:38 PM	Helium valve closed
7/27/2010	12:21:38 PM	H2 valve closed
7/27/2010	12:21:38 PM	BCl3 valve closed
7/27/2010	12:21:38 PM	PH3 valve closed
7/27/2010	12:21:38 PM	SiCl4 pre valve closed
7/27/2010	12:21:39 PM	SiCl4 post valve closed
7/27/2010	12:21:39 PM	Main Vac valve closed
7/27/2010	12:21:39 PM	Bubbler valve closed
7/27/2010	12:21:39 PM	Bypass valve opened
7/27/2010	12:21:39 PM	Helium MFC set to  0.000000
7/27/2010	12:21:39 PM	H2 MFC set to  0.000000
7/27/2010	12:21:39 PM	BCl3 MFC set to  0.000000
7/27/2010	12:21:39 PM	PHl3 MFC set to  0.000000
7/27/2010	12:21:39 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:21:39 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:21:39 PM	Tube furnace set to 0
7/27/2010	12:22:05 PM	Helium valve closed
7/27/2010	12:22:05 PM	H2 valve closed
7/27/2010	12:22:05 PM	BCl3 valve closed
7/27/2010	12:22:05 PM	PH3 valve closed
7/27/2010	12:22:05 PM	SiCl4 pre valve closed
7/27/2010	12:22:05 PM	SiCl4 post valve closed
7/27/2010	12:22:05 PM	Bubbler valve closed
7/27/2010	12:22:05 PM	Main Vac valve opened
7/27/2010	12:22:05 PM	Bypass valve opened
7/27/2010	12:22:05 PM	Helium MFC set to  0.000000
7/27/2010	12:22:05 PM	H2 MFC set to  0.000000
7/27/2010	12:22:05 PM	BCl3 MFC set to  0.000000
7/27/2010	12:22:05 PM	PHl3 MFC set to  0.000000
7/27/2010	12:22:05 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:22:05 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:22:05 PM	Tube furnace set to 0
7/27/2010	12:27:05 PM	Helium valve closed
7/27/2010	12:27:05 PM	H2 valve closed
7/27/2010	12:27:05 PM	BCl3 valve closed
7/27/2010	12:27:05 PM	PH3 valve closed
7/27/2010	12:27:05 PM	SiCl4 pre valve closed
7/27/2010	12:27:05 PM	SiCl4 post valve closed
7/27/2010	12:27:05 PM	Bubbler valve closed
7/27/2010	12:27:05 PM	Main Vac valve opened
7/27/2010	12:27:05 PM	Bypass valve opened
7/27/2010	12:27:05 PM	Helium MFC set to  0.000000
7/27/2010	12:27:05 PM	H2 MFC set to  0.000000
7/27/2010	12:27:05 PM	BCl3 MFC set to  0.000000
7/27/2010	12:27:05 PM	PHl3 MFC set to  0.000000
7/27/2010	12:27:05 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:27:05 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:27:05 PM	Tube furnace set to 0
7/27/2010	12:27:06 PM	Run finished at 12:27 PM
7/27/2010	12:27:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/27/2010	12:32:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	12:32:48 PM	Recipe started at 12:32 PM
7/27/2010	12:32:48 PM	Helium valve closed
7/27/2010	12:32:48 PM	H2 valve closed
7/27/2010	12:32:48 PM	BCl3 valve closed
7/27/2010	12:32:48 PM	PH3 valve closed
7/27/2010	12:32:48 PM	SiCl4 pre valve closed
7/27/2010	12:32:48 PM	SiCl4 post valve closed
7/27/2010	12:32:48 PM	Main Vac valve closed
7/27/2010	12:32:48 PM	Bubbler valve closed
7/27/2010	12:32:48 PM	Bypass valve opened
7/27/2010	12:32:48 PM	Helium MFC set to  0.000000
7/27/2010	12:32:48 PM	H2 MFC set to  0.000000
7/27/2010	12:32:48 PM	BCl3 MFC set to  0.000000
7/27/2010	12:32:48 PM	PHl3 MFC set to  0.000000
7/27/2010	12:32:48 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:32:48 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:32:48 PM	Tube furnace set to 0
7/27/2010	12:32:48 PM	Helium valve closed
7/27/2010	12:32:48 PM	H2 valve closed
7/27/2010	12:32:48 PM	BCl3 valve closed
7/27/2010	12:32:48 PM	PH3 valve closed
7/27/2010	12:32:48 PM	SiCl4 pre valve closed
7/27/2010	12:32:48 PM	SiCl4 post valve closed
7/27/2010	12:32:48 PM	Bubbler valve closed
7/27/2010	12:32:48 PM	Main Vac valve opened
7/27/2010	12:32:48 PM	Bypass valve opened
7/27/2010	12:32:48 PM	Helium MFC set to  0.000000
7/27/2010	12:32:48 PM	H2 MFC set to  0.000000
7/27/2010	12:32:48 PM	BCl3 MFC set to  0.000000
7/27/2010	12:32:48 PM	PHl3 MFC set to  0.000000
7/27/2010	12:32:48 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:32:48 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:32:48 PM	Tube furnace set to 0
7/27/2010	12:33:48 PM	H2 valve closed
7/27/2010	12:33:48 PM	BCl3 valve closed
7/27/2010	12:33:48 PM	PH3 valve closed
7/27/2010	12:33:48 PM	SiCl4 pre valve closed
7/27/2010	12:33:48 PM	SiCl4 post valve closed
7/27/2010	12:33:48 PM	Bubbler valve closed
7/27/2010	12:33:48 PM	Helium valve opened
7/27/2010	12:33:48 PM	Main Vac valve opened
7/27/2010	12:33:48 PM	Bypass valve opened
7/27/2010	12:33:48 PM	Helium MFC set to  100.000000
7/27/2010	12:33:48 PM	H2 MFC set to  0.000000
7/27/2010	12:33:48 PM	BCl3 MFC set to  0.000000
7/27/2010	12:33:48 PM	PHl3 MFC set to  0.000000
7/27/2010	12:33:48 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:33:48 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:33:49 PM	Tube furnace set to 0
7/27/2010	12:42:49 PM	Helium valve closed
7/27/2010	12:42:49 PM	H2 valve closed
7/27/2010	12:42:49 PM	BCl3 valve closed
7/27/2010	12:42:49 PM	PH3 valve closed
7/27/2010	12:42:49 PM	SiCl4 pre valve closed
7/27/2010	12:42:49 PM	SiCl4 post valve closed
7/27/2010	12:42:49 PM	Bubbler valve closed
7/27/2010	12:42:49 PM	Main Vac valve opened
7/27/2010	12:42:49 PM	Bypass valve opened
7/27/2010	12:42:49 PM	Helium MFC set to  0.000000
7/27/2010	12:42:49 PM	H2 MFC set to  0.000000
7/27/2010	12:42:49 PM	BCl3 MFC set to  0.000000
7/27/2010	12:42:49 PM	PHl3 MFC set to  0.000000
7/27/2010	12:42:49 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:42:49 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:42:49 PM	Tube furnace set to 0
7/27/2010	12:43:49 PM	H2 valve closed
7/27/2010	12:43:49 PM	BCl3 valve closed
7/27/2010	12:43:49 PM	PH3 valve closed
7/27/2010	12:43:49 PM	SiCl4 pre valve closed
7/27/2010	12:43:49 PM	SiCl4 post valve closed
7/27/2010	12:43:49 PM	Bubbler valve closed
7/27/2010	12:43:49 PM	Helium valve opened
7/27/2010	12:43:49 PM	Main Vac valve opened
7/27/2010	12:43:49 PM	Bypass valve opened
7/27/2010	12:43:49 PM	Helium MFC set to  100.000000
7/27/2010	12:43:49 PM	H2 MFC set to  0.000000
7/27/2010	12:43:49 PM	BCl3 MFC set to  0.000000
7/27/2010	12:43:49 PM	PHl3 MFC set to  0.000000
7/27/2010	12:43:49 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:43:49 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:43:49 PM	Tube furnace set to 0
7/27/2010	12:52:49 PM	Helium valve closed
7/27/2010	12:52:49 PM	H2 valve closed
7/27/2010	12:52:49 PM	BCl3 valve closed
7/27/2010	12:52:49 PM	PH3 valve closed
7/27/2010	12:52:49 PM	SiCl4 pre valve closed
7/27/2010	12:52:49 PM	SiCl4 post valve closed
7/27/2010	12:52:49 PM	Bubbler valve closed
7/27/2010	12:52:49 PM	Main Vac valve opened
7/27/2010	12:52:49 PM	Bypass valve opened
7/27/2010	12:52:49 PM	Helium MFC set to  0.000000
7/27/2010	12:52:49 PM	H2 MFC set to  0.000000
7/27/2010	12:52:49 PM	BCl3 MFC set to  0.000000
7/27/2010	12:52:49 PM	PHl3 MFC set to  0.000000
7/27/2010	12:52:49 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:52:49 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:52:49 PM	Tube furnace set to 0
7/27/2010	12:53:49 PM	H2 valve closed
7/27/2010	12:53:49 PM	BCl3 valve closed
7/27/2010	12:53:49 PM	PH3 valve closed
7/27/2010	12:53:49 PM	SiCl4 pre valve closed
7/27/2010	12:53:49 PM	SiCl4 post valve closed
7/27/2010	12:53:49 PM	Bubbler valve closed
7/27/2010	12:53:49 PM	Helium valve opened
7/27/2010	12:53:49 PM	Main Vac valve opened
7/27/2010	12:53:49 PM	Bypass valve opened
7/27/2010	12:53:49 PM	Helium MFC set to  100.000000
7/27/2010	12:53:49 PM	H2 MFC set to  0.000000
7/27/2010	12:53:49 PM	BCl3 MFC set to  0.000000
7/27/2010	12:53:49 PM	PHl3 MFC set to  0.000000
7/27/2010	12:53:49 PM	SiCl4 MFC set to  0.000000
7/27/2010	12:53:49 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	12:53:49 PM	Tube furnace set to 0
7/27/2010	1:02:49 PM	Helium valve closed
7/27/2010	1:02:49 PM	H2 valve closed
7/27/2010	1:02:49 PM	BCl3 valve closed
7/27/2010	1:02:49 PM	PH3 valve closed
7/27/2010	1:02:49 PM	SiCl4 pre valve closed
7/27/2010	1:02:49 PM	SiCl4 post valve closed
7/27/2010	1:02:49 PM	Bubbler valve closed
7/27/2010	1:02:49 PM	Main Vac valve opened
7/27/2010	1:02:49 PM	Bypass valve opened
7/27/2010	1:02:49 PM	Helium MFC set to  0.000000
7/27/2010	1:02:49 PM	H2 MFC set to  0.000000
7/27/2010	1:02:49 PM	BCl3 MFC set to  0.000000
7/27/2010	1:02:49 PM	PHl3 MFC set to  0.000000
7/27/2010	1:02:49 PM	SiCl4 MFC set to  0.000000
7/27/2010	1:02:49 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:02:50 PM	Tube furnace set to 0
7/27/2010	1:02:51 PM	Run finished at 1:02 PM
7/27/2010	1:02:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	1:03:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	1:03:43 PM	Recipe started at 1:03 PM
7/27/2010	1:03:43 PM	Helium valve closed
7/27/2010	1:03:43 PM	H2 valve closed
7/27/2010	1:03:43 PM	BCl3 valve closed
7/27/2010	1:03:43 PM	PH3 valve closed
7/27/2010	1:03:43 PM	SiCl4 pre valve closed
7/27/2010	1:03:43 PM	SiCl4 post valve closed
7/27/2010	1:03:43 PM	Main Vac valve closed
7/27/2010	1:03:43 PM	Bubbler valve closed
7/27/2010	1:03:43 PM	Bypass valve opened
7/27/2010	1:03:43 PM	Helium MFC set to  0.000000
7/27/2010	1:03:43 PM	H2 MFC set to  0.000000
7/27/2010	1:03:43 PM	BCl3 MFC set to  0.000000
7/27/2010	1:03:43 PM	PHl3 MFC set to  0.000000
7/27/2010	1:03:43 PM	SiCl4 MFC set to  0.000000
7/27/2010	1:03:43 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:03:44 PM	Tube furnace set to 0
7/27/2010	1:03:44 PM	Helium valve closed
7/27/2010	1:03:44 PM	H2 valve closed
7/27/2010	1:03:44 PM	BCl3 valve closed
7/27/2010	1:03:44 PM	PH3 valve closed
7/27/2010	1:03:44 PM	SiCl4 pre valve closed
7/27/2010	1:03:44 PM	SiCl4 post valve closed
7/27/2010	1:03:44 PM	Bubbler valve closed
7/27/2010	1:03:44 PM	Main Vac valve opened
7/27/2010	1:03:44 PM	Bypass valve opened
7/27/2010	1:03:44 PM	Helium MFC set to  0.000000
7/27/2010	1:03:44 PM	H2 MFC set to  0.000000
7/27/2010	1:03:44 PM	BCl3 MFC set to  0.000000
7/27/2010	1:03:44 PM	PHl3 MFC set to  0.000000
7/27/2010	1:03:44 PM	SiCl4 MFC set to  0.000000
7/27/2010	1:03:44 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:03:44 PM	Tube furnace set to 0
7/27/2010	1:04:44 PM	H2 valve closed
7/27/2010	1:04:44 PM	BCl3 valve closed
7/27/2010	1:04:44 PM	PH3 valve closed
7/27/2010	1:04:44 PM	SiCl4 pre valve closed
7/27/2010	1:04:44 PM	SiCl4 post valve closed
7/27/2010	1:04:44 PM	Bubbler valve closed
7/27/2010	1:04:44 PM	Helium valve opened
7/27/2010	1:04:44 PM	Main Vac valve opened
7/27/2010	1:04:44 PM	Bypass valve opened
7/27/2010	1:04:44 PM	Helium MFC set to  100.000000
7/27/2010	1:04:44 PM	H2 MFC set to  0.000000
7/27/2010	1:04:44 PM	BCl3 MFC set to  0.000000
7/27/2010	1:04:44 PM	PHl3 MFC set to  0.000000
7/27/2010	1:04:44 PM	SiCl4 MFC set to  0.000000
7/27/2010	1:04:44 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:04:44 PM	Tube furnace set to 0
7/27/2010	1:13:44 PM	Helium valve closed
7/27/2010	1:13:44 PM	H2 valve closed
7/27/2010	1:13:44 PM	BCl3 valve closed
7/27/2010	1:13:44 PM	PH3 valve closed
7/27/2010	1:13:44 PM	SiCl4 pre valve closed
7/27/2010	1:13:44 PM	SiCl4 post valve closed
7/27/2010	1:13:44 PM	Bubbler valve closed
7/27/2010	1:13:44 PM	Main Vac valve opened
7/27/2010	1:13:44 PM	Bypass valve opened
7/27/2010	1:13:44 PM	Helium MFC set to  0.000000
7/27/2010	1:13:44 PM	H2 MFC set to  0.000000
7/27/2010	1:13:44 PM	BCl3 MFC set to  0.000000
7/27/2010	1:13:44 PM	PHl3 MFC set to  0.000000
7/27/2010	1:13:44 PM	SiCl4 MFC set to  0.000000
7/27/2010	1:13:44 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:13:44 PM	Tube furnace set to 0
7/27/2010	1:14:44 PM	H2 valve closed
7/27/2010	1:14:44 PM	BCl3 valve closed
7/27/2010	1:14:44 PM	PH3 valve closed
7/27/2010	1:14:44 PM	SiCl4 pre valve closed
7/27/2010	1:14:44 PM	SiCl4 post valve closed
7/27/2010	1:14:44 PM	Bubbler valve closed
7/27/2010	1:14:44 PM	Helium valve opened
7/27/2010	1:14:44 PM	Main Vac valve opened
7/27/2010	1:14:44 PM	Bypass valve opened
7/27/2010	1:14:44 PM	Helium MFC set to  100.000000
7/27/2010	1:14:44 PM	H2 MFC set to  0.000000
7/27/2010	1:14:44 PM	BCl3 MFC set to  0.000000
7/27/2010	1:14:44 PM	PHl3 MFC set to  0.000000
7/27/2010	1:14:44 PM	SiCl4 MFC set to  0.000000
7/27/2010	1:14:44 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:14:45 PM	Tube furnace set to 0
7/27/2010	1:23:45 PM	Helium valve closed
7/27/2010	1:23:45 PM	H2 valve closed
7/27/2010	1:23:45 PM	BCl3 valve closed
7/27/2010	1:23:45 PM	PH3 valve closed
7/27/2010	1:23:45 PM	SiCl4 pre valve closed
7/27/2010	1:23:45 PM	SiCl4 post valve closed
7/27/2010	1:23:45 PM	Bubbler valve closed
7/27/2010	1:23:45 PM	Main Vac valve opened
7/27/2010	1:23:45 PM	Bypass valve opened
7/27/2010	1:23:45 PM	Helium MFC set to  0.000000
7/27/2010	1:23:45 PM	H2 MFC set to  0.000000
7/27/2010	1:23:45 PM	BCl3 MFC set to  0.000000
7/27/2010	1:23:45 PM	PHl3 MFC set to  0.000000
7/27/2010	1:23:45 PM	SiCl4 MFC set to  0.000000
7/27/2010	1:23:45 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:23:45 PM	Tube furnace set to 0
7/27/2010	1:24:45 PM	H2 valve closed
7/27/2010	1:24:45 PM	BCl3 valve closed
7/27/2010	1:24:45 PM	PH3 valve closed
7/27/2010	1:24:45 PM	SiCl4 pre valve closed
7/27/2010	1:24:45 PM	SiCl4 post valve closed
7/27/2010	1:24:45 PM	Bubbler valve closed
7/27/2010	1:24:45 PM	Helium valve opened
7/27/2010	1:24:45 PM	Main Vac valve opened
7/27/2010	1:24:45 PM	Bypass valve opened
7/27/2010	1:24:45 PM	Helium MFC set to  100.000000
7/27/2010	1:24:45 PM	H2 MFC set to  0.000000
7/27/2010	1:24:45 PM	BCl3 MFC set to  0.000000
7/27/2010	1:24:45 PM	PHl3 MFC set to  0.000000
7/27/2010	1:24:45 PM	SiCl4 MFC set to  0.000000
7/27/2010	1:24:45 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:24:45 PM	Tube furnace set to 0
7/27/2010	1:33:45 PM	Helium valve closed
7/27/2010	1:33:45 PM	H2 valve closed
7/27/2010	1:33:45 PM	BCl3 valve closed
7/27/2010	1:33:45 PM	PH3 valve closed
7/27/2010	1:33:45 PM	SiCl4 pre valve closed
7/27/2010	1:33:45 PM	SiCl4 post valve closed
7/27/2010	1:33:45 PM	Bubbler valve closed
7/27/2010	1:33:45 PM	Main Vac valve opened
7/27/2010	1:33:45 PM	Bypass valve opened
7/27/2010	1:33:45 PM	Helium MFC set to  0.000000
7/27/2010	1:33:45 PM	H2 MFC set to  0.000000
7/27/2010	1:33:45 PM	BCl3 MFC set to  0.000000
7/27/2010	1:33:45 PM	PHl3 MFC set to  0.000000
7/27/2010	1:33:45 PM	SiCl4 MFC set to  0.000000
7/27/2010	1:33:45 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	1:33:45 PM	Tube furnace set to 0
7/27/2010	1:33:46 PM	Run finished at 1:33 PM
7/27/2010	1:33:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	2:22:21 PM	Bypass valve closed
7/27/2010	2:22:22 PM	Main Vac valve closed
7/27/2010	2:22:49 PM	Bypass valve opened
7/27/2010	2:22:49 PM	Main Vac valve opened
7/27/2010	2:23:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	2:23:44 PM	Recipe started at 2:23 PM
7/27/2010	2:23:44 PM	Helium valve closed
7/27/2010	2:23:44 PM	H2 valve closed
7/27/2010	2:23:44 PM	BCl3 valve closed
7/27/2010	2:23:44 PM	PH3 valve closed
7/27/2010	2:23:44 PM	SiCl4 pre valve closed
7/27/2010	2:23:44 PM	SiCl4 post valve closed
7/27/2010	2:23:44 PM	Main Vac valve closed
7/27/2010	2:23:44 PM	Bubbler valve closed
7/27/2010	2:23:44 PM	Bypass valve opened
7/27/2010	2:23:44 PM	Helium MFC set to  0.000000
7/27/2010	2:23:44 PM	H2 MFC set to  0.000000
7/27/2010	2:23:44 PM	BCl3 MFC set to  0.000000
7/27/2010	2:23:44 PM	PHl3 MFC set to  0.000000
7/27/2010	2:23:44 PM	SiCl4 MFC set to  0.000000
7/27/2010	2:23:44 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:23:44 PM	Tube furnace set to 0
7/27/2010	2:23:44 PM	Helium valve closed
7/27/2010	2:23:44 PM	H2 valve closed
7/27/2010	2:23:44 PM	BCl3 valve closed
7/27/2010	2:23:44 PM	PH3 valve closed
7/27/2010	2:23:44 PM	SiCl4 pre valve closed
7/27/2010	2:23:44 PM	SiCl4 post valve closed
7/27/2010	2:23:44 PM	Bubbler valve closed
7/27/2010	2:23:44 PM	Main Vac valve opened
7/27/2010	2:23:44 PM	Bypass valve opened
7/27/2010	2:23:44 PM	Helium MFC set to  0.000000
7/27/2010	2:23:44 PM	H2 MFC set to  0.000000
7/27/2010	2:23:44 PM	BCl3 MFC set to  0.000000
7/27/2010	2:23:44 PM	PHl3 MFC set to  0.000000
7/27/2010	2:23:44 PM	SiCl4 MFC set to  0.000000
7/27/2010	2:23:44 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:23:44 PM	Tube furnace set to 0
7/27/2010	2:24:44 PM	H2 valve closed
7/27/2010	2:24:44 PM	BCl3 valve closed
7/27/2010	2:24:44 PM	PH3 valve closed
7/27/2010	2:24:44 PM	SiCl4 pre valve closed
7/27/2010	2:24:44 PM	SiCl4 post valve closed
7/27/2010	2:24:44 PM	Bubbler valve closed
7/27/2010	2:24:44 PM	Helium valve opened
7/27/2010	2:24:44 PM	Main Vac valve opened
7/27/2010	2:24:44 PM	Bypass valve opened
7/27/2010	2:24:44 PM	Helium MFC set to  100.000000
7/27/2010	2:24:44 PM	H2 MFC set to  0.000000
7/27/2010	2:24:44 PM	BCl3 MFC set to  0.000000
7/27/2010	2:24:44 PM	PHl3 MFC set to  0.000000
7/27/2010	2:24:44 PM	SiCl4 MFC set to  0.000000
7/27/2010	2:24:44 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:24:45 PM	Tube furnace set to 0
7/27/2010	2:33:45 PM	Helium valve closed
7/27/2010	2:33:45 PM	H2 valve closed
7/27/2010	2:33:45 PM	BCl3 valve closed
7/27/2010	2:33:45 PM	PH3 valve closed
7/27/2010	2:33:45 PM	SiCl4 pre valve closed
7/27/2010	2:33:45 PM	SiCl4 post valve closed
7/27/2010	2:33:45 PM	Bubbler valve closed
7/27/2010	2:33:45 PM	Main Vac valve opened
7/27/2010	2:33:45 PM	Bypass valve opened
7/27/2010	2:33:45 PM	Helium MFC set to  0.000000
7/27/2010	2:33:45 PM	H2 MFC set to  0.000000
7/27/2010	2:33:45 PM	BCl3 MFC set to  0.000000
7/27/2010	2:33:45 PM	PHl3 MFC set to  0.000000
7/27/2010	2:33:45 PM	SiCl4 MFC set to  0.000000
7/27/2010	2:33:45 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:33:45 PM	Tube furnace set to 0
7/27/2010	2:34:45 PM	H2 valve closed
7/27/2010	2:34:45 PM	BCl3 valve closed
7/27/2010	2:34:45 PM	PH3 valve closed
7/27/2010	2:34:45 PM	SiCl4 pre valve closed
7/27/2010	2:34:45 PM	SiCl4 post valve closed
7/27/2010	2:34:45 PM	Bubbler valve closed
7/27/2010	2:34:45 PM	Helium valve opened
7/27/2010	2:34:45 PM	Main Vac valve opened
7/27/2010	2:34:45 PM	Bypass valve opened
7/27/2010	2:34:45 PM	Helium MFC set to  100.000000
7/27/2010	2:34:45 PM	H2 MFC set to  0.000000
7/27/2010	2:34:45 PM	BCl3 MFC set to  0.000000
7/27/2010	2:34:45 PM	PHl3 MFC set to  0.000000
7/27/2010	2:34:45 PM	SiCl4 MFC set to  0.000000
7/27/2010	2:34:45 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:34:45 PM	Tube furnace set to 0
7/27/2010	2:43:45 PM	Helium valve closed
7/27/2010	2:43:45 PM	H2 valve closed
7/27/2010	2:43:45 PM	BCl3 valve closed
7/27/2010	2:43:45 PM	PH3 valve closed
7/27/2010	2:43:45 PM	SiCl4 pre valve closed
7/27/2010	2:43:45 PM	SiCl4 post valve closed
7/27/2010	2:43:45 PM	Bubbler valve closed
7/27/2010	2:43:45 PM	Main Vac valve opened
7/27/2010	2:43:45 PM	Bypass valve opened
7/27/2010	2:43:45 PM	Helium MFC set to  0.000000
7/27/2010	2:43:45 PM	H2 MFC set to  0.000000
7/27/2010	2:43:45 PM	BCl3 MFC set to  0.000000
7/27/2010	2:43:45 PM	PHl3 MFC set to  0.000000
7/27/2010	2:43:45 PM	SiCl4 MFC set to  0.000000
7/27/2010	2:43:45 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:43:45 PM	Tube furnace set to 0
7/27/2010	2:44:45 PM	H2 valve closed
7/27/2010	2:44:45 PM	BCl3 valve closed
7/27/2010	2:44:45 PM	PH3 valve closed
7/27/2010	2:44:45 PM	SiCl4 pre valve closed
7/27/2010	2:44:45 PM	SiCl4 post valve closed
7/27/2010	2:44:45 PM	Bubbler valve closed
7/27/2010	2:44:45 PM	Helium valve opened
7/27/2010	2:44:45 PM	Main Vac valve opened
7/27/2010	2:44:45 PM	Bypass valve opened
7/27/2010	2:44:45 PM	Helium MFC set to  100.000000
7/27/2010	2:44:45 PM	H2 MFC set to  0.000000
7/27/2010	2:44:45 PM	BCl3 MFC set to  0.000000
7/27/2010	2:44:45 PM	PHl3 MFC set to  0.000000
7/27/2010	2:44:45 PM	SiCl4 MFC set to  0.000000
7/27/2010	2:44:45 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:44:45 PM	Tube furnace set to 0
7/27/2010	2:53:24 PM	Helium valve closed
7/27/2010	2:53:24 PM	H2 valve closed
7/27/2010	2:53:24 PM	BCl3 valve closed
7/27/2010	2:53:24 PM	PH3 valve closed
7/27/2010	2:53:24 PM	SiCl4 pre valve closed
7/27/2010	2:53:24 PM	SiCl4 post valve closed
7/27/2010	2:53:24 PM	Bubbler valve closed
7/27/2010	2:53:24 PM	Main Vac valve opened
7/27/2010	2:53:24 PM	Bypass valve opened
7/27/2010	2:53:24 PM	Helium MFC set to  0.000000
7/27/2010	2:53:24 PM	H2 MFC set to  0.000000
7/27/2010	2:53:24 PM	BCl3 MFC set to  0.000000
7/27/2010	2:53:24 PM	PHl3 MFC set to  0.000000
7/27/2010	2:53:24 PM	SiCl4 MFC set to  0.000000
7/27/2010	2:53:24 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:53:24 PM	Tube furnace set to 0
7/27/2010	2:53:25 PM	Run finished at 2:53 PM
7/27/2010	2:53:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	2:55:32 PM	Bypass valve closed
7/27/2010	2:55:32 PM	Main Vac valve closed
7/27/2010	2:56:04 PM	Bypass valve opened
7/27/2010	2:56:04 PM	Main Vac valve opened
7/27/2010	2:57:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	2:57:49 PM	Recipe started at 2:57 PM
7/27/2010	2:57:49 PM	Helium valve closed
7/27/2010	2:57:49 PM	H2 valve closed
7/27/2010	2:57:49 PM	BCl3 valve closed
7/27/2010	2:57:49 PM	PH3 valve closed
7/27/2010	2:57:49 PM	SiCl4 pre valve closed
7/27/2010	2:57:49 PM	SiCl4 post valve closed
7/27/2010	2:57:49 PM	Main Vac valve closed
7/27/2010	2:57:49 PM	Bubbler valve closed
7/27/2010	2:57:49 PM	Bypass valve opened
7/27/2010	2:57:49 PM	Helium MFC set to  0.000000
7/27/2010	2:57:49 PM	H2 MFC set to  0.000000
7/27/2010	2:57:49 PM	BCl3 MFC set to  0.000000
7/27/2010	2:57:49 PM	PHl3 MFC set to  0.000000
7/27/2010	2:57:49 PM	SiCl4 MFC set to  0.000000
7/27/2010	2:57:49 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:57:49 PM	Tube furnace set to 0
7/27/2010	2:57:50 PM	Helium valve closed
7/27/2010	2:57:50 PM	H2 valve closed
7/27/2010	2:57:50 PM	BCl3 valve closed
7/27/2010	2:57:50 PM	PH3 valve closed
7/27/2010	2:57:50 PM	SiCl4 pre valve closed
7/27/2010	2:57:50 PM	SiCl4 post valve closed
7/27/2010	2:57:50 PM	Bubbler valve closed
7/27/2010	2:57:50 PM	Main Vac valve opened
7/27/2010	2:57:50 PM	Bypass valve opened
7/27/2010	2:57:50 PM	Helium MFC set to  0.000000
7/27/2010	2:57:50 PM	H2 MFC set to  0.000000
7/27/2010	2:57:50 PM	BCl3 MFC set to  0.000000
7/27/2010	2:57:50 PM	PHl3 MFC set to  0.000000
7/27/2010	2:57:50 PM	SiCl4 MFC set to  0.000000
7/27/2010	2:57:50 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:57:50 PM	Tube furnace set to 0
7/27/2010	2:58:50 PM	H2 valve closed
7/27/2010	2:58:50 PM	BCl3 valve closed
7/27/2010	2:58:50 PM	PH3 valve closed
7/27/2010	2:58:50 PM	SiCl4 pre valve closed
7/27/2010	2:58:50 PM	SiCl4 post valve closed
7/27/2010	2:58:50 PM	Bubbler valve closed
7/27/2010	2:58:50 PM	Helium valve opened
7/27/2010	2:58:50 PM	Main Vac valve opened
7/27/2010	2:58:50 PM	Bypass valve opened
7/27/2010	2:58:50 PM	Helium MFC set to  100.000000
7/27/2010	2:58:50 PM	H2 MFC set to  0.000000
7/27/2010	2:58:50 PM	BCl3 MFC set to  0.000000
7/27/2010	2:58:50 PM	PHl3 MFC set to  0.000000
7/27/2010	2:58:50 PM	SiCl4 MFC set to  0.000000
7/27/2010	2:58:50 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	2:58:50 PM	Tube furnace set to 0
7/27/2010	3:07:50 PM	Helium valve closed
7/27/2010	3:07:50 PM	H2 valve closed
7/27/2010	3:07:50 PM	BCl3 valve closed
7/27/2010	3:07:50 PM	PH3 valve closed
7/27/2010	3:07:50 PM	SiCl4 pre valve closed
7/27/2010	3:07:50 PM	SiCl4 post valve closed
7/27/2010	3:07:50 PM	Bubbler valve closed
7/27/2010	3:07:50 PM	Main Vac valve opened
7/27/2010	3:07:50 PM	Bypass valve opened
7/27/2010	3:07:50 PM	Helium MFC set to  0.000000
7/27/2010	3:07:50 PM	H2 MFC set to  0.000000
7/27/2010	3:07:50 PM	BCl3 MFC set to  0.000000
7/27/2010	3:07:50 PM	PHl3 MFC set to  0.000000
7/27/2010	3:07:50 PM	SiCl4 MFC set to  0.000000
7/27/2010	3:07:50 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	3:07:50 PM	Tube furnace set to 0
7/27/2010	3:08:50 PM	H2 valve closed
7/27/2010	3:08:50 PM	BCl3 valve closed
7/27/2010	3:08:50 PM	PH3 valve closed
7/27/2010	3:08:50 PM	SiCl4 pre valve closed
7/27/2010	3:08:50 PM	SiCl4 post valve closed
7/27/2010	3:08:50 PM	Bubbler valve closed
7/27/2010	3:08:50 PM	Helium valve opened
7/27/2010	3:08:50 PM	Main Vac valve opened
7/27/2010	3:08:50 PM	Bypass valve opened
7/27/2010	3:08:50 PM	Helium MFC set to  100.000000
7/27/2010	3:08:50 PM	H2 MFC set to  0.000000
7/27/2010	3:08:50 PM	BCl3 MFC set to  0.000000
7/27/2010	3:08:50 PM	PHl3 MFC set to  0.000000
7/27/2010	3:08:50 PM	SiCl4 MFC set to  0.000000
7/27/2010	3:08:50 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	3:08:50 PM	Tube furnace set to 0
7/27/2010	3:17:50 PM	Helium valve closed
7/27/2010	3:17:50 PM	H2 valve closed
7/27/2010	3:17:50 PM	BCl3 valve closed
7/27/2010	3:17:50 PM	PH3 valve closed
7/27/2010	3:17:50 PM	SiCl4 pre valve closed
7/27/2010	3:17:50 PM	SiCl4 post valve closed
7/27/2010	3:17:50 PM	Bubbler valve closed
7/27/2010	3:17:50 PM	Main Vac valve opened
7/27/2010	3:17:50 PM	Bypass valve opened
7/27/2010	3:17:50 PM	Helium MFC set to  0.000000
7/27/2010	3:17:50 PM	H2 MFC set to  0.000000
7/27/2010	3:17:50 PM	BCl3 MFC set to  0.000000
7/27/2010	3:17:50 PM	PHl3 MFC set to  0.000000
7/27/2010	3:17:50 PM	SiCl4 MFC set to  0.000000
7/27/2010	3:17:50 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	3:17:51 PM	Tube furnace set to 0
7/27/2010	3:18:45 PM	Run aborted at 3:18 PM
7/27/2010	3:18:45 PM	Helium valve closed
7/27/2010	3:18:45 PM	H2 valve closed
7/27/2010	3:18:45 PM	BCl3 valve closed
7/27/2010	3:18:45 PM	PH3 valve closed
7/27/2010	3:18:45 PM	SiCl4 pre valve closed
7/27/2010	3:18:45 PM	SiCl4 post valve closed
7/27/2010	3:18:45 PM	Bypass valve closed
7/27/2010	3:18:45 PM	Main Vac valve closed
7/27/2010	3:18:45 PM	Bubbler valve closed
7/27/2010	3:18:45 PM	Helium MFC set to  0.000000
7/27/2010	3:18:45 PM	H2 MFC set to  0.000000
7/27/2010	3:18:45 PM	BCl3 MFC set to  0.000000
7/27/2010	3:18:45 PM	PHl3 MFC set to  0.000000
7/27/2010	3:18:45 PM	SiCl4 MFC set to  0.000000
7/27/2010	3:18:46 PM	Tube furnace set to 0
7/27/2010	3:18:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	3:18:51 PM	Bypass valve opened
7/27/2010	3:18:51 PM	Main Vac valve opened
7/27/2010	3:21:57 PM	Bypass valve closed
7/27/2010	3:21:58 PM	Main Vac valve closed
7/27/2010	3:22:23 PM	Bypass valve opened
7/27/2010	3:22:24 PM	Main Vac valve opened
7/27/2010	3:23:30 PM	Recipe started at 3:23 PM
7/27/2010	3:23:30 PM	Helium valve closed
7/27/2010	3:23:30 PM	BCl3 valve closed
7/27/2010	3:23:30 PM	PH3 valve closed
7/27/2010	3:23:30 PM	SiCl4 pre valve closed
7/27/2010	3:23:30 PM	SiCl4 post valve closed
7/27/2010	3:23:30 PM	Main Vac valve closed
7/27/2010	3:23:30 PM	Bypass valve closed
7/27/2010	3:23:30 PM	Bubbler valve closed
7/27/2010	3:23:30 PM	H2 valve opened
7/27/2010	3:23:30 PM	Helium MFC set to  0.000000
7/27/2010	3:23:30 PM	H2 MFC set to  500.000000
7/27/2010	3:23:30 PM	BCl3 MFC set to  0.000000
7/27/2010	3:23:30 PM	PHl3 MFC set to  0.000000
7/27/2010	3:23:30 PM	SiCl4 MFC set to  0.000000
7/27/2010	3:23:30 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	3:23:31 PM	Tube furnace set to 0
7/27/2010	3:24:53 PM	Helium valve closed
7/27/2010	3:24:53 PM	BCl3 valve closed
7/27/2010	3:24:53 PM	PH3 valve closed
7/27/2010	3:24:53 PM	SiCl4 pre valve closed
7/27/2010	3:24:53 PM	SiCl4 post valve closed
7/27/2010	3:24:53 PM	Main Vac valve closed
7/27/2010	3:24:53 PM	Bypass valve closed
7/27/2010	3:24:53 PM	H2 valve opened
7/27/2010	3:24:53 PM	Bubbler valve opened
7/27/2010	3:24:53 PM	Helium MFC set to  0.000000
7/27/2010	3:24:53 PM	H2 MFC set to  500.000000
7/27/2010	3:24:53 PM	BCl3 MFC set to  0.000000
7/27/2010	3:24:53 PM	PHl3 MFC set to  0.000000
7/27/2010	3:24:53 PM	SiCl4 MFC set to  0.000000
7/27/2010	3:24:53 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	3:24:53 PM	Tube furnace set to 1000
7/27/2010	3:44:53 PM	Helium valve closed
7/27/2010	3:44:53 PM	PH3 valve closed
7/27/2010	3:44:53 PM	Main Vac valve closed
7/27/2010	3:44:53 PM	Bypass valve closed
7/27/2010	3:44:53 PM	H2 valve opened
7/27/2010	3:44:53 PM	BCl3 valve opened
7/27/2010	3:44:53 PM	SiCl4 pre valve opened
7/27/2010	3:44:53 PM	SiCl4 post valve opened
7/27/2010	3:44:53 PM	Bubbler valve opened
7/27/2010	3:44:53 PM	Helium MFC set to  0.000000
7/27/2010	3:44:53 PM	H2 MFC set to  500.000000
7/27/2010	3:44:53 PM	BCl3 MFC set to  12.000000
7/27/2010	3:44:53 PM	PHl3 MFC set to  0.000000
7/27/2010	3:44:53 PM	SiCl4 MFC set to  50.000000
7/27/2010	3:44:53 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	3:44:53 PM	Tube furnace set to 1000
7/27/2010	4:04:53 PM	H2 valve closed
7/27/2010	4:04:53 PM	BCl3 valve closed
7/27/2010	4:04:53 PM	PH3 valve closed
7/27/2010	4:04:53 PM	SiCl4 pre valve closed
7/27/2010	4:04:53 PM	SiCl4 post valve closed
7/27/2010	4:04:53 PM	Main Vac valve closed
7/27/2010	4:04:53 PM	Bypass valve closed
7/27/2010	4:04:53 PM	Helium valve opened
7/27/2010	4:04:53 PM	Bubbler valve opened
7/27/2010	4:04:53 PM	Helium MFC set to  500.000000
7/27/2010	4:04:53 PM	H2 MFC set to  0.000000
7/27/2010	4:04:53 PM	BCl3 MFC set to  0.000000
7/27/2010	4:04:53 PM	PHl3 MFC set to  0.000000
7/27/2010	4:04:53 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:04:53 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:04:53 PM	Tube furnace set to 0
7/27/2010	4:24:53 PM	Helium valve closed
7/27/2010	4:24:53 PM	H2 valve closed
7/27/2010	4:24:53 PM	BCl3 valve closed
7/27/2010	4:24:53 PM	PH3 valve closed
7/27/2010	4:24:53 PM	SiCl4 pre valve closed
7/27/2010	4:24:53 PM	SiCl4 post valve closed
7/27/2010	4:24:53 PM	Main Vac valve closed
7/27/2010	4:24:53 PM	Bypass valve closed
7/27/2010	4:24:53 PM	Bubbler valve closed
7/27/2010	4:24:53 PM	Helium MFC set to  0.000000
7/27/2010	4:24:53 PM	H2 MFC set to  0.000000
7/27/2010	4:24:53 PM	BCl3 MFC set to  0.000000
7/27/2010	4:24:53 PM	PHl3 MFC set to  0.000000
7/27/2010	4:24:53 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:24:53 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:24:53 PM	Tube furnace set to 0
7/27/2010	4:24:53 PM	Run finished at 4:24 PM
7/27/2010	4:36:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/27/2010	4:36:13 PM	Recipe started at 4:36 PM
7/27/2010	4:36:13 PM	H2 valve closed
7/27/2010	4:36:13 PM	BCl3 valve closed
7/27/2010	4:36:13 PM	PH3 valve closed
7/27/2010	4:36:13 PM	SiCl4 pre valve closed
7/27/2010	4:36:13 PM	SiCl4 post valve closed
7/27/2010	4:36:13 PM	Main Vac valve closed
7/27/2010	4:36:13 PM	Bypass valve closed
7/27/2010	4:36:13 PM	Bubbler valve closed
7/27/2010	4:36:13 PM	Helium valve opened
7/27/2010	4:36:13 PM	Helium MFC set to  500.000000
7/27/2010	4:36:13 PM	H2 MFC set to  0.000000
7/27/2010	4:36:13 PM	BCl3 MFC set to  0.000000
7/27/2010	4:36:13 PM	PHl3 MFC set to  0.000000
7/27/2010	4:36:13 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:36:13 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:36:13 PM	Tube furnace set to 0
7/27/2010	4:36:15 PM	Helium valve closed
7/27/2010	4:36:15 PM	H2 valve closed
7/27/2010	4:36:15 PM	BCl3 valve closed
7/27/2010	4:36:15 PM	PH3 valve closed
7/27/2010	4:36:15 PM	SiCl4 pre valve closed
7/27/2010	4:36:15 PM	SiCl4 post valve closed
7/27/2010	4:36:15 PM	Main Vac valve closed
7/27/2010	4:36:15 PM	Bypass valve closed
7/27/2010	4:36:15 PM	Bubbler valve closed
7/27/2010	4:36:15 PM	Helium MFC set to  0.000000
7/27/2010	4:36:15 PM	H2 MFC set to  0.000000
7/27/2010	4:36:15 PM	BCl3 MFC set to  0.000000
7/27/2010	4:36:15 PM	PHl3 MFC set to  0.000000
7/27/2010	4:36:15 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:36:15 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:36:15 PM	Tube furnace set to 0
7/27/2010	4:36:30 PM	Helium valve closed
7/27/2010	4:36:30 PM	H2 valve closed
7/27/2010	4:36:30 PM	BCl3 valve closed
7/27/2010	4:36:30 PM	PH3 valve closed
7/27/2010	4:36:30 PM	SiCl4 pre valve closed
7/27/2010	4:36:30 PM	SiCl4 post valve closed
7/27/2010	4:36:30 PM	Main Vac valve closed
7/27/2010	4:36:30 PM	Bubbler valve closed
7/27/2010	4:36:30 PM	Bypass valve opened
7/27/2010	4:36:30 PM	Helium MFC set to  0.000000
7/27/2010	4:36:30 PM	H2 MFC set to  0.000000
7/27/2010	4:36:30 PM	BCl3 MFC set to  0.000000
7/27/2010	4:36:30 PM	PHl3 MFC set to  0.000000
7/27/2010	4:36:30 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:36:30 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:36:30 PM	Tube furnace set to 0
7/27/2010	4:37:06 PM	Helium valve closed
7/27/2010	4:37:06 PM	H2 valve closed
7/27/2010	4:37:06 PM	BCl3 valve closed
7/27/2010	4:37:06 PM	PH3 valve closed
7/27/2010	4:37:06 PM	SiCl4 pre valve closed
7/27/2010	4:37:06 PM	SiCl4 post valve closed
7/27/2010	4:37:06 PM	Bubbler valve closed
7/27/2010	4:37:06 PM	Main Vac valve opened
7/27/2010	4:37:06 PM	Bypass valve opened
7/27/2010	4:37:06 PM	Helium MFC set to  0.000000
7/27/2010	4:37:06 PM	H2 MFC set to  0.000000
7/27/2010	4:37:06 PM	BCl3 MFC set to  0.000000
7/27/2010	4:37:06 PM	PHl3 MFC set to  0.000000
7/27/2010	4:37:06 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:37:06 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:37:06 PM	Tube furnace set to 0
7/27/2010	4:42:06 PM	H2 valve closed
7/27/2010	4:42:06 PM	BCl3 valve closed
7/27/2010	4:42:06 PM	PH3 valve closed
7/27/2010	4:42:06 PM	SiCl4 pre valve closed
7/27/2010	4:42:06 PM	SiCl4 post valve closed
7/27/2010	4:42:06 PM	Main Vac valve closed
7/27/2010	4:42:06 PM	Bypass valve closed
7/27/2010	4:42:06 PM	Bubbler valve closed
7/27/2010	4:42:06 PM	Helium valve opened
7/27/2010	4:42:06 PM	Helium MFC set to  500.000000
7/27/2010	4:42:06 PM	H2 MFC set to  0.000000
7/27/2010	4:42:06 PM	BCl3 MFC set to  0.000000
7/27/2010	4:42:06 PM	PHl3 MFC set to  0.000000
7/27/2010	4:42:06 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:42:06 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:42:06 PM	Tube furnace set to 0
7/27/2010	4:43:26 PM	Helium valve closed
7/27/2010	4:43:26 PM	H2 valve closed
7/27/2010	4:43:26 PM	BCl3 valve closed
7/27/2010	4:43:26 PM	PH3 valve closed
7/27/2010	4:43:26 PM	SiCl4 pre valve closed
7/27/2010	4:43:26 PM	SiCl4 post valve closed
7/27/2010	4:43:26 PM	Main Vac valve closed
7/27/2010	4:43:26 PM	Bypass valve closed
7/27/2010	4:43:26 PM	Bubbler valve closed
7/27/2010	4:43:26 PM	Helium MFC set to  0.000000
7/27/2010	4:43:26 PM	H2 MFC set to  0.000000
7/27/2010	4:43:26 PM	BCl3 MFC set to  0.000000
7/27/2010	4:43:26 PM	PHl3 MFC set to  0.000000
7/27/2010	4:43:26 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:43:26 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:43:26 PM	Tube furnace set to 0
7/27/2010	4:43:41 PM	Helium valve closed
7/27/2010	4:43:41 PM	H2 valve closed
7/27/2010	4:43:41 PM	BCl3 valve closed
7/27/2010	4:43:41 PM	PH3 valve closed
7/27/2010	4:43:41 PM	SiCl4 pre valve closed
7/27/2010	4:43:41 PM	SiCl4 post valve closed
7/27/2010	4:43:41 PM	Main Vac valve closed
7/27/2010	4:43:41 PM	Bubbler valve closed
7/27/2010	4:43:41 PM	Bypass valve opened
7/27/2010	4:43:41 PM	Helium MFC set to  0.000000
7/27/2010	4:43:41 PM	H2 MFC set to  0.000000
7/27/2010	4:43:41 PM	BCl3 MFC set to  0.000000
7/27/2010	4:43:41 PM	PHl3 MFC set to  0.000000
7/27/2010	4:43:41 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:43:41 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:43:41 PM	Tube furnace set to 0
7/27/2010	4:44:07 PM	Helium valve closed
7/27/2010	4:44:07 PM	H2 valve closed
7/27/2010	4:44:07 PM	BCl3 valve closed
7/27/2010	4:44:07 PM	PH3 valve closed
7/27/2010	4:44:07 PM	SiCl4 pre valve closed
7/27/2010	4:44:07 PM	SiCl4 post valve closed
7/27/2010	4:44:07 PM	Bubbler valve closed
7/27/2010	4:44:07 PM	Main Vac valve opened
7/27/2010	4:44:07 PM	Bypass valve opened
7/27/2010	4:44:07 PM	Helium MFC set to  0.000000
7/27/2010	4:44:07 PM	H2 MFC set to  0.000000
7/27/2010	4:44:07 PM	BCl3 MFC set to  0.000000
7/27/2010	4:44:07 PM	PHl3 MFC set to  0.000000
7/27/2010	4:44:07 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:44:07 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:44:07 PM	Tube furnace set to 0
7/27/2010	4:49:07 PM	H2 valve closed
7/27/2010	4:49:07 PM	BCl3 valve closed
7/27/2010	4:49:07 PM	PH3 valve closed
7/27/2010	4:49:07 PM	SiCl4 pre valve closed
7/27/2010	4:49:07 PM	SiCl4 post valve closed
7/27/2010	4:49:07 PM	Main Vac valve closed
7/27/2010	4:49:07 PM	Bypass valve closed
7/27/2010	4:49:07 PM	Bubbler valve closed
7/27/2010	4:49:07 PM	Helium valve opened
7/27/2010	4:49:07 PM	Helium MFC set to  500.000000
7/27/2010	4:49:07 PM	H2 MFC set to  0.000000
7/27/2010	4:49:07 PM	BCl3 MFC set to  0.000000
7/27/2010	4:49:07 PM	PHl3 MFC set to  0.000000
7/27/2010	4:49:07 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:49:07 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:49:08 PM	Tube furnace set to 0
7/27/2010	4:50:28 PM	Helium valve closed
7/27/2010	4:50:28 PM	H2 valve closed
7/27/2010	4:50:28 PM	BCl3 valve closed
7/27/2010	4:50:28 PM	PH3 valve closed
7/27/2010	4:50:28 PM	SiCl4 pre valve closed
7/27/2010	4:50:28 PM	SiCl4 post valve closed
7/27/2010	4:50:28 PM	Main Vac valve closed
7/27/2010	4:50:28 PM	Bypass valve closed
7/27/2010	4:50:28 PM	Bubbler valve closed
7/27/2010	4:50:28 PM	Helium MFC set to  0.000000
7/27/2010	4:50:28 PM	H2 MFC set to  0.000000
7/27/2010	4:50:28 PM	BCl3 MFC set to  0.000000
7/27/2010	4:50:28 PM	PHl3 MFC set to  0.000000
7/27/2010	4:50:28 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:50:28 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:50:29 PM	Tube furnace set to 0
7/27/2010	4:50:44 PM	Helium valve closed
7/27/2010	4:50:44 PM	H2 valve closed
7/27/2010	4:50:44 PM	BCl3 valve closed
7/27/2010	4:50:44 PM	PH3 valve closed
7/27/2010	4:50:44 PM	SiCl4 pre valve closed
7/27/2010	4:50:44 PM	SiCl4 post valve closed
7/27/2010	4:50:44 PM	Main Vac valve closed
7/27/2010	4:50:44 PM	Bubbler valve closed
7/27/2010	4:50:44 PM	Bypass valve opened
7/27/2010	4:50:44 PM	Helium MFC set to  0.000000
7/27/2010	4:50:44 PM	H2 MFC set to  0.000000
7/27/2010	4:50:44 PM	BCl3 MFC set to  0.000000
7/27/2010	4:50:44 PM	PHl3 MFC set to  0.000000
7/27/2010	4:50:44 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:50:44 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:50:44 PM	Tube furnace set to 0
7/27/2010	4:51:10 PM	Helium valve closed
7/27/2010	4:51:10 PM	H2 valve closed
7/27/2010	4:51:10 PM	BCl3 valve closed
7/27/2010	4:51:10 PM	PH3 valve closed
7/27/2010	4:51:10 PM	SiCl4 pre valve closed
7/27/2010	4:51:10 PM	SiCl4 post valve closed
7/27/2010	4:51:10 PM	Bubbler valve closed
7/27/2010	4:51:10 PM	Main Vac valve opened
7/27/2010	4:51:10 PM	Bypass valve opened
7/27/2010	4:51:10 PM	Helium MFC set to  0.000000
7/27/2010	4:51:10 PM	H2 MFC set to  0.000000
7/27/2010	4:51:10 PM	BCl3 MFC set to  0.000000
7/27/2010	4:51:10 PM	PHl3 MFC set to  0.000000
7/27/2010	4:51:10 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:51:10 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:51:10 PM	Tube furnace set to 0
7/27/2010	4:56:10 PM	Helium valve closed
7/27/2010	4:56:10 PM	H2 valve closed
7/27/2010	4:56:10 PM	BCl3 valve closed
7/27/2010	4:56:10 PM	PH3 valve closed
7/27/2010	4:56:10 PM	SiCl4 pre valve closed
7/27/2010	4:56:10 PM	SiCl4 post valve closed
7/27/2010	4:56:10 PM	Bubbler valve closed
7/27/2010	4:56:10 PM	Main Vac valve opened
7/27/2010	4:56:10 PM	Bypass valve opened
7/27/2010	4:56:10 PM	Helium MFC set to  0.000000
7/27/2010	4:56:10 PM	H2 MFC set to  0.000000
7/27/2010	4:56:10 PM	BCl3 MFC set to  0.000000
7/27/2010	4:56:10 PM	PHl3 MFC set to  0.000000
7/27/2010	4:56:10 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:56:10 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:56:10 PM	Tube furnace set to 0
7/27/2010	4:56:11 PM	Run finished at 4:56 PM
7/27/2010	4:56:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/27/2010	4:56:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	4:56:59 PM	Recipe started at 4:56 PM
7/27/2010	4:56:59 PM	Helium valve closed
7/27/2010	4:56:59 PM	H2 valve closed
7/27/2010	4:56:59 PM	BCl3 valve closed
7/27/2010	4:56:59 PM	PH3 valve closed
7/27/2010	4:56:59 PM	SiCl4 pre valve closed
7/27/2010	4:56:59 PM	SiCl4 post valve closed
7/27/2010	4:56:59 PM	Main Vac valve closed
7/27/2010	4:56:59 PM	Bubbler valve closed
7/27/2010	4:56:59 PM	Bypass valve opened
7/27/2010	4:56:59 PM	Helium MFC set to  0.000000
7/27/2010	4:56:59 PM	H2 MFC set to  0.000000
7/27/2010	4:56:59 PM	BCl3 MFC set to  0.000000
7/27/2010	4:56:59 PM	PHl3 MFC set to  0.000000
7/27/2010	4:56:59 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:56:59 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:56:59 PM	Tube furnace set to 0
7/27/2010	4:56:59 PM	Helium valve closed
7/27/2010	4:56:59 PM	H2 valve closed
7/27/2010	4:56:59 PM	BCl3 valve closed
7/27/2010	4:56:59 PM	PH3 valve closed
7/27/2010	4:56:59 PM	SiCl4 pre valve closed
7/27/2010	4:56:59 PM	SiCl4 post valve closed
7/27/2010	4:56:59 PM	Bubbler valve closed
7/27/2010	4:56:59 PM	Main Vac valve opened
7/27/2010	4:56:59 PM	Bypass valve opened
7/27/2010	4:56:59 PM	Helium MFC set to  0.000000
7/27/2010	4:56:59 PM	H2 MFC set to  0.000000
7/27/2010	4:56:59 PM	BCl3 MFC set to  0.000000
7/27/2010	4:56:59 PM	PHl3 MFC set to  0.000000
7/27/2010	4:56:59 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:56:59 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:57:00 PM	Tube furnace set to 0
7/27/2010	4:58:00 PM	H2 valve closed
7/27/2010	4:58:00 PM	BCl3 valve closed
7/27/2010	4:58:00 PM	PH3 valve closed
7/27/2010	4:58:00 PM	SiCl4 pre valve closed
7/27/2010	4:58:00 PM	SiCl4 post valve closed
7/27/2010	4:58:00 PM	Bubbler valve closed
7/27/2010	4:58:00 PM	Helium valve opened
7/27/2010	4:58:00 PM	Main Vac valve opened
7/27/2010	4:58:00 PM	Bypass valve opened
7/27/2010	4:58:00 PM	Helium MFC set to  100.000000
7/27/2010	4:58:00 PM	H2 MFC set to  0.000000
7/27/2010	4:58:00 PM	BCl3 MFC set to  0.000000
7/27/2010	4:58:00 PM	PHl3 MFC set to  0.000000
7/27/2010	4:58:00 PM	SiCl4 MFC set to  0.000000
7/27/2010	4:58:00 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	4:58:00 PM	Tube furnace set to 0
7/27/2010	5:07:00 PM	Helium valve closed
7/27/2010	5:07:00 PM	H2 valve closed
7/27/2010	5:07:00 PM	BCl3 valve closed
7/27/2010	5:07:00 PM	PH3 valve closed
7/27/2010	5:07:00 PM	SiCl4 pre valve closed
7/27/2010	5:07:00 PM	SiCl4 post valve closed
7/27/2010	5:07:00 PM	Bubbler valve closed
7/27/2010	5:07:00 PM	Main Vac valve opened
7/27/2010	5:07:00 PM	Bypass valve opened
7/27/2010	5:07:00 PM	Helium MFC set to  0.000000
7/27/2010	5:07:00 PM	H2 MFC set to  0.000000
7/27/2010	5:07:00 PM	BCl3 MFC set to  0.000000
7/27/2010	5:07:00 PM	PHl3 MFC set to  0.000000
7/27/2010	5:07:00 PM	SiCl4 MFC set to  0.000000
7/27/2010	5:07:00 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	5:07:00 PM	Tube furnace set to 0
7/27/2010	5:08:00 PM	H2 valve closed
7/27/2010	5:08:00 PM	BCl3 valve closed
7/27/2010	5:08:00 PM	PH3 valve closed
7/27/2010	5:08:00 PM	SiCl4 pre valve closed
7/27/2010	5:08:00 PM	SiCl4 post valve closed
7/27/2010	5:08:00 PM	Bubbler valve closed
7/27/2010	5:08:00 PM	Helium valve opened
7/27/2010	5:08:00 PM	Main Vac valve opened
7/27/2010	5:08:00 PM	Bypass valve opened
7/27/2010	5:08:00 PM	Helium MFC set to  100.000000
7/27/2010	5:08:00 PM	H2 MFC set to  0.000000
7/27/2010	5:08:00 PM	BCl3 MFC set to  0.000000
7/27/2010	5:08:00 PM	PHl3 MFC set to  0.000000
7/27/2010	5:08:00 PM	SiCl4 MFC set to  0.000000
7/27/2010	5:08:00 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	5:08:00 PM	Tube furnace set to 0
7/27/2010	5:17:00 PM	Helium valve closed
7/27/2010	5:17:00 PM	H2 valve closed
7/27/2010	5:17:00 PM	BCl3 valve closed
7/27/2010	5:17:00 PM	PH3 valve closed
7/27/2010	5:17:00 PM	SiCl4 pre valve closed
7/27/2010	5:17:00 PM	SiCl4 post valve closed
7/27/2010	5:17:00 PM	Bubbler valve closed
7/27/2010	5:17:00 PM	Main Vac valve opened
7/27/2010	5:17:00 PM	Bypass valve opened
7/27/2010	5:17:00 PM	Helium MFC set to  0.000000
7/27/2010	5:17:00 PM	H2 MFC set to  0.000000
7/27/2010	5:17:00 PM	BCl3 MFC set to  0.000000
7/27/2010	5:17:00 PM	PHl3 MFC set to  0.000000
7/27/2010	5:17:00 PM	SiCl4 MFC set to  0.000000
7/27/2010	5:17:00 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	5:17:00 PM	Tube furnace set to 0
7/27/2010	5:18:00 PM	H2 valve closed
7/27/2010	5:18:00 PM	BCl3 valve closed
7/27/2010	5:18:00 PM	PH3 valve closed
7/27/2010	5:18:00 PM	SiCl4 pre valve closed
7/27/2010	5:18:00 PM	SiCl4 post valve closed
7/27/2010	5:18:00 PM	Bubbler valve closed
7/27/2010	5:18:00 PM	Helium valve opened
7/27/2010	5:18:00 PM	Main Vac valve opened
7/27/2010	5:18:00 PM	Bypass valve opened
7/27/2010	5:18:00 PM	Helium MFC set to  100.000000
7/27/2010	5:18:00 PM	H2 MFC set to  0.000000
7/27/2010	5:18:00 PM	BCl3 MFC set to  0.000000
7/27/2010	5:18:00 PM	PHl3 MFC set to  0.000000
7/27/2010	5:18:00 PM	SiCl4 MFC set to  0.000000
7/27/2010	5:18:00 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	5:18:01 PM	Tube furnace set to 0
7/27/2010	5:27:01 PM	Helium valve closed
7/27/2010	5:27:01 PM	H2 valve closed
7/27/2010	5:27:01 PM	BCl3 valve closed
7/27/2010	5:27:01 PM	PH3 valve closed
7/27/2010	5:27:01 PM	SiCl4 pre valve closed
7/27/2010	5:27:01 PM	SiCl4 post valve closed
7/27/2010	5:27:01 PM	Bubbler valve closed
7/27/2010	5:27:01 PM	Main Vac valve opened
7/27/2010	5:27:01 PM	Bypass valve opened
7/27/2010	5:27:01 PM	Helium MFC set to  0.000000
7/27/2010	5:27:01 PM	H2 MFC set to  0.000000
7/27/2010	5:27:01 PM	BCl3 MFC set to  0.000000
7/27/2010	5:27:01 PM	PHl3 MFC set to  0.000000
7/27/2010	5:27:01 PM	SiCl4 MFC set to  0.000000
7/27/2010	5:27:01 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	5:27:01 PM	Tube furnace set to 0
7/27/2010	5:27:02 PM	Run finished at 5:27 PM
7/27/2010	5:27:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	5:40:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	5:40:22 PM	Recipe started at 5:40 PM
7/27/2010	5:40:22 PM	Helium valve closed
7/27/2010	5:40:22 PM	H2 valve closed
7/27/2010	5:40:22 PM	BCl3 valve closed
7/27/2010	5:40:22 PM	PH3 valve closed
7/27/2010	5:40:22 PM	SiCl4 pre valve closed
7/27/2010	5:40:22 PM	SiCl4 post valve closed
7/27/2010	5:40:22 PM	Main Vac valve closed
7/27/2010	5:40:22 PM	Bubbler valve closed
7/27/2010	5:40:22 PM	Bypass valve opened
7/27/2010	5:40:22 PM	Helium MFC set to  0.000000
7/27/2010	5:40:22 PM	H2 MFC set to  0.000000
7/27/2010	5:40:22 PM	BCl3 MFC set to  0.000000
7/27/2010	5:40:22 PM	PHl3 MFC set to  0.000000
7/27/2010	5:40:22 PM	SiCl4 MFC set to  0.000000
7/27/2010	5:40:22 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	5:40:22 PM	Tube furnace set to 0
7/27/2010	5:40:22 PM	Helium valve closed
7/27/2010	5:40:22 PM	H2 valve closed
7/27/2010	5:40:22 PM	BCl3 valve closed
7/27/2010	5:40:22 PM	PH3 valve closed
7/27/2010	5:40:22 PM	SiCl4 pre valve closed
7/27/2010	5:40:22 PM	SiCl4 post valve closed
7/27/2010	5:40:22 PM	Bubbler valve closed
7/27/2010	5:40:22 PM	Main Vac valve opened
7/27/2010	5:40:22 PM	Bypass valve opened
7/27/2010	5:40:22 PM	Helium MFC set to  0.000000
7/27/2010	5:40:22 PM	H2 MFC set to  0.000000
7/27/2010	5:40:22 PM	BCl3 MFC set to  0.000000
7/27/2010	5:40:22 PM	PHl3 MFC set to  0.000000
7/27/2010	5:40:22 PM	SiCl4 MFC set to  0.000000
7/27/2010	5:40:22 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	5:40:22 PM	Tube furnace set to 0
7/27/2010	5:41:22 PM	H2 valve closed
7/27/2010	5:41:22 PM	BCl3 valve closed
7/27/2010	5:41:22 PM	PH3 valve closed
7/27/2010	5:41:22 PM	SiCl4 pre valve closed
7/27/2010	5:41:22 PM	SiCl4 post valve closed
7/27/2010	5:41:22 PM	Bubbler valve closed
7/27/2010	5:41:22 PM	Helium valve opened
7/27/2010	5:41:22 PM	Main Vac valve opened
7/27/2010	5:41:22 PM	Bypass valve opened
7/27/2010	5:41:22 PM	Helium MFC set to  100.000000
7/27/2010	5:41:22 PM	H2 MFC set to  0.000000
7/27/2010	5:41:22 PM	BCl3 MFC set to  0.000000
7/27/2010	5:41:22 PM	PHl3 MFC set to  0.000000
7/27/2010	5:41:22 PM	SiCl4 MFC set to  0.000000
7/27/2010	5:41:22 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	5:41:22 PM	Tube furnace set to 0
7/27/2010	5:50:22 PM	Helium valve closed
7/27/2010	5:50:22 PM	H2 valve closed
7/27/2010	5:50:22 PM	BCl3 valve closed
7/27/2010	5:50:22 PM	PH3 valve closed
7/27/2010	5:50:22 PM	SiCl4 pre valve closed
7/27/2010	5:50:22 PM	SiCl4 post valve closed
7/27/2010	5:50:23 PM	Bubbler valve closed
7/27/2010	5:50:23 PM	Main Vac valve opened
7/27/2010	5:50:23 PM	Bypass valve opened
7/27/2010	5:50:23 PM	Helium MFC set to  0.000000
7/27/2010	5:50:23 PM	H2 MFC set to  0.000000
7/27/2010	5:50:23 PM	BCl3 MFC set to  0.000000
7/27/2010	5:50:23 PM	PHl3 MFC set to  0.000000
7/27/2010	5:50:23 PM	SiCl4 MFC set to  0.000000
7/27/2010	5:50:23 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	5:50:23 PM	Tube furnace set to 0
7/27/2010	5:51:23 PM	H2 valve closed
7/27/2010	5:51:23 PM	BCl3 valve closed
7/27/2010	5:51:23 PM	PH3 valve closed
7/27/2010	5:51:23 PM	SiCl4 pre valve closed
7/27/2010	5:51:23 PM	SiCl4 post valve closed
7/27/2010	5:51:23 PM	Bubbler valve closed
7/27/2010	5:51:23 PM	Helium valve opened
7/27/2010	5:51:23 PM	Main Vac valve opened
7/27/2010	5:51:23 PM	Bypass valve opened
7/27/2010	5:51:23 PM	Helium MFC set to  100.000000
7/27/2010	5:51:23 PM	H2 MFC set to  0.000000
7/27/2010	5:51:23 PM	BCl3 MFC set to  0.000000
7/27/2010	5:51:23 PM	PHl3 MFC set to  0.000000
7/27/2010	5:51:23 PM	SiCl4 MFC set to  0.000000
7/27/2010	5:51:23 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	5:51:23 PM	Tube furnace set to 0
7/27/2010	5:59:52 PM	Helium valve closed
7/27/2010	5:59:52 PM	H2 valve closed
7/27/2010	5:59:52 PM	BCl3 valve closed
7/27/2010	5:59:52 PM	PH3 valve closed
7/27/2010	5:59:52 PM	SiCl4 pre valve closed
7/27/2010	5:59:52 PM	SiCl4 post valve closed
7/27/2010	5:59:52 PM	Bubbler valve closed
7/27/2010	5:59:52 PM	Main Vac valve opened
7/27/2010	5:59:52 PM	Bypass valve opened
7/27/2010	5:59:52 PM	Helium MFC set to  0.000000
7/27/2010	5:59:52 PM	H2 MFC set to  0.000000
7/27/2010	5:59:52 PM	BCl3 MFC set to  0.000000
7/27/2010	5:59:52 PM	PHl3 MFC set to  0.000000
7/27/2010	5:59:52 PM	SiCl4 MFC set to  0.000000
7/27/2010	5:59:52 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	5:59:52 PM	Tube furnace set to 0
7/27/2010	5:59:53 PM	H2 valve closed
7/27/2010	5:59:53 PM	BCl3 valve closed
7/27/2010	5:59:53 PM	PH3 valve closed
7/27/2010	5:59:53 PM	SiCl4 pre valve closed
7/27/2010	5:59:53 PM	SiCl4 post valve closed
7/27/2010	5:59:53 PM	Bubbler valve closed
7/27/2010	5:59:53 PM	Helium valve opened
7/27/2010	5:59:53 PM	Main Vac valve opened
7/27/2010	5:59:53 PM	Bypass valve opened
7/27/2010	5:59:53 PM	Helium MFC set to  100.000000
7/27/2010	5:59:53 PM	H2 MFC set to  0.000000
7/27/2010	5:59:53 PM	BCl3 MFC set to  0.000000
7/27/2010	5:59:53 PM	PHl3 MFC set to  0.000000
7/27/2010	5:59:53 PM	SiCl4 MFC set to  0.000000
7/27/2010	5:59:53 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	5:59:53 PM	Tube furnace set to 0
7/27/2010	5:59:55 PM	Helium valve closed
7/27/2010	5:59:55 PM	H2 valve closed
7/27/2010	5:59:55 PM	BCl3 valve closed
7/27/2010	5:59:55 PM	PH3 valve closed
7/27/2010	5:59:55 PM	SiCl4 pre valve closed
7/27/2010	5:59:55 PM	SiCl4 post valve closed
7/27/2010	5:59:55 PM	Bubbler valve closed
7/27/2010	5:59:55 PM	Main Vac valve opened
7/27/2010	5:59:55 PM	Bypass valve opened
7/27/2010	5:59:55 PM	Helium MFC set to  0.000000
7/27/2010	5:59:55 PM	H2 MFC set to  0.000000
7/27/2010	5:59:55 PM	BCl3 MFC set to  0.000000
7/27/2010	5:59:55 PM	PHl3 MFC set to  0.000000
7/27/2010	5:59:55 PM	SiCl4 MFC set to  0.000000
7/27/2010	5:59:55 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	5:59:55 PM	Tube furnace set to 0
7/27/2010	5:59:56 PM	Run finished at 5:59 PM
7/27/2010	5:59:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	6:00:52 PM	Bypass valve closed
7/27/2010	6:00:52 PM	Main Vac valve closed
7/27/2010	6:01:16 PM	Bypass valve opened
7/27/2010	6:01:17 PM	Main Vac valve opened
7/27/2010	6:02:23 PM	Recipe started at 6:02 PM
7/27/2010	6:02:23 PM	Helium valve closed
7/27/2010	6:02:23 PM	BCl3 valve closed
7/27/2010	6:02:23 PM	PH3 valve closed
7/27/2010	6:02:23 PM	SiCl4 pre valve closed
7/27/2010	6:02:23 PM	SiCl4 post valve closed
7/27/2010	6:02:23 PM	Main Vac valve closed
7/27/2010	6:02:23 PM	Bypass valve closed
7/27/2010	6:02:23 PM	Bubbler valve closed
7/27/2010	6:02:23 PM	H2 valve opened
7/27/2010	6:02:23 PM	Helium MFC set to  0.000000
7/27/2010	6:02:23 PM	H2 MFC set to  500.000000
7/27/2010	6:02:23 PM	BCl3 MFC set to  0.000000
7/27/2010	6:02:23 PM	PHl3 MFC set to  0.000000
7/27/2010	6:02:23 PM	SiCl4 MFC set to  0.000000
7/27/2010	6:02:23 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	6:02:23 PM	Tube furnace set to 0
7/27/2010	6:03:43 PM	Helium valve closed
7/27/2010	6:03:43 PM	BCl3 valve closed
7/27/2010	6:03:43 PM	PH3 valve closed
7/27/2010	6:03:43 PM	SiCl4 pre valve closed
7/27/2010	6:03:43 PM	SiCl4 post valve closed
7/27/2010	6:03:43 PM	Main Vac valve closed
7/27/2010	6:03:43 PM	Bypass valve closed
7/27/2010	6:03:43 PM	H2 valve opened
7/27/2010	6:03:43 PM	Bubbler valve opened
7/27/2010	6:03:43 PM	Helium MFC set to  0.000000
7/27/2010	6:03:43 PM	H2 MFC set to  500.000000
7/27/2010	6:03:43 PM	BCl3 MFC set to  0.000000
7/27/2010	6:03:43 PM	PHl3 MFC set to  0.000000
7/27/2010	6:03:43 PM	SiCl4 MFC set to  0.000000
7/27/2010	6:03:43 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	6:03:44 PM	Tube furnace set to 1000
7/27/2010	6:23:44 PM	Helium valve closed
7/27/2010	6:23:44 PM	PH3 valve closed
7/27/2010	6:23:44 PM	Main Vac valve closed
7/27/2010	6:23:44 PM	Bypass valve closed
7/27/2010	6:23:44 PM	H2 valve opened
7/27/2010	6:23:44 PM	BCl3 valve opened
7/27/2010	6:23:44 PM	SiCl4 pre valve opened
7/27/2010	6:23:44 PM	SiCl4 post valve opened
7/27/2010	6:23:44 PM	Bubbler valve opened
7/27/2010	6:23:44 PM	Helium MFC set to  0.000000
7/27/2010	6:23:44 PM	H2 MFC set to  500.000000
7/27/2010	6:23:44 PM	BCl3 MFC set to  6.000000
7/27/2010	6:23:44 PM	PHl3 MFC set to  0.000000
7/27/2010	6:23:44 PM	SiCl4 MFC set to  50.000000
7/27/2010	6:23:44 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	6:23:44 PM	Tube furnace set to 1000
7/27/2010	6:43:44 PM	H2 valve closed
7/27/2010	6:43:44 PM	BCl3 valve closed
7/27/2010	6:43:44 PM	PH3 valve closed
7/27/2010	6:43:44 PM	SiCl4 pre valve closed
7/27/2010	6:43:44 PM	SiCl4 post valve closed
7/27/2010	6:43:44 PM	Main Vac valve closed
7/27/2010	6:43:44 PM	Bypass valve closed
7/27/2010	6:43:44 PM	Helium valve opened
7/27/2010	6:43:44 PM	Bubbler valve opened
7/27/2010	6:43:44 PM	Helium MFC set to  500.000000
7/27/2010	6:43:44 PM	H2 MFC set to  0.000000
7/27/2010	6:43:44 PM	BCl3 MFC set to  0.000000
7/27/2010	6:43:44 PM	PHl3 MFC set to  0.000000
7/27/2010	6:43:44 PM	SiCl4 MFC set to  0.000000
7/27/2010	6:43:44 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	6:43:44 PM	Tube furnace set to 0
7/27/2010	7:02:23 PM	Helium valve closed
7/27/2010	7:02:23 PM	H2 valve closed
7/27/2010	7:02:23 PM	BCl3 valve closed
7/27/2010	7:02:23 PM	PH3 valve closed
7/27/2010	7:02:23 PM	SiCl4 pre valve closed
7/27/2010	7:02:23 PM	SiCl4 post valve closed
7/27/2010	7:02:23 PM	Main Vac valve closed
7/27/2010	7:02:23 PM	Bypass valve closed
7/27/2010	7:02:23 PM	Bubbler valve closed
7/27/2010	7:02:23 PM	Helium MFC set to  0.000000
7/27/2010	7:02:23 PM	H2 MFC set to  0.000000
7/27/2010	7:02:23 PM	BCl3 MFC set to  0.000000
7/27/2010	7:02:23 PM	PHl3 MFC set to  0.000000
7/27/2010	7:02:23 PM	SiCl4 MFC set to  0.000000
7/27/2010	7:02:23 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	7:02:23 PM	Tube furnace set to 0
7/27/2010	7:02:24 PM	Run finished at 7:02 PM
7/27/2010	7:04:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	7:04:51 PM	Recipe started at 7:04 PM
7/27/2010	7:04:51 PM	Helium valve closed
7/27/2010	7:04:51 PM	H2 valve closed
7/27/2010	7:04:51 PM	BCl3 valve closed
7/27/2010	7:04:51 PM	PH3 valve closed
7/27/2010	7:04:51 PM	SiCl4 pre valve closed
7/27/2010	7:04:51 PM	SiCl4 post valve closed
7/27/2010	7:04:51 PM	Main Vac valve closed
7/27/2010	7:04:51 PM	Bubbler valve closed
7/27/2010	7:04:51 PM	Bypass valve opened
7/27/2010	7:04:51 PM	Helium MFC set to  0.000000
7/27/2010	7:04:51 PM	H2 MFC set to  0.000000
7/27/2010	7:04:51 PM	BCl3 MFC set to  0.000000
7/27/2010	7:04:51 PM	PHl3 MFC set to  0.000000
7/27/2010	7:04:51 PM	SiCl4 MFC set to  0.000000
7/27/2010	7:04:51 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	7:04:51 PM	Tube furnace set to 0
7/27/2010	7:05:25 PM	Helium valve closed
7/27/2010	7:05:25 PM	H2 valve closed
7/27/2010	7:05:25 PM	BCl3 valve closed
7/27/2010	7:05:25 PM	PH3 valve closed
7/27/2010	7:05:25 PM	SiCl4 pre valve closed
7/27/2010	7:05:25 PM	SiCl4 post valve closed
7/27/2010	7:05:25 PM	Bubbler valve closed
7/27/2010	7:05:25 PM	Main Vac valve opened
7/27/2010	7:05:25 PM	Bypass valve opened
7/27/2010	7:05:25 PM	Helium MFC set to  0.000000
7/27/2010	7:05:25 PM	H2 MFC set to  0.000000
7/27/2010	7:05:25 PM	BCl3 MFC set to  0.000000
7/27/2010	7:05:25 PM	PHl3 MFC set to  0.000000
7/27/2010	7:05:25 PM	SiCl4 MFC set to  0.000000
7/27/2010	7:05:25 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	7:05:25 PM	Tube furnace set to 0
7/27/2010	7:05:25 PM	Run finished at 7:05 PM
7/27/2010	7:05:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	11:02:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2010	11:02:27 PM	Recipe started at 11:02 PM
7/27/2010	11:02:27 PM	H2 valve closed
7/27/2010	11:02:27 PM	BCl3 valve closed
7/27/2010	11:02:27 PM	PH3 valve closed
7/27/2010	11:02:27 PM	SiCl4 pre valve closed
7/27/2010	11:02:27 PM	SiCl4 post valve closed
7/27/2010	11:02:27 PM	Main Vac valve closed
7/27/2010	11:02:27 PM	Bypass valve closed
7/27/2010	11:02:27 PM	Bubbler valve closed
7/27/2010	11:02:27 PM	Helium valve opened
7/27/2010	11:02:27 PM	Helium MFC set to  500.000000
7/27/2010	11:02:27 PM	H2 MFC set to  0.000000
7/27/2010	11:02:27 PM	BCl3 MFC set to  0.000000
7/27/2010	11:02:27 PM	PHl3 MFC set to  0.000000
7/27/2010	11:02:27 PM	SiCl4 MFC set to  0.000000
7/27/2010	11:02:27 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	11:02:28 PM	Tube furnace set to 0
7/27/2010	11:03:47 PM	Helium valve closed
7/27/2010	11:03:47 PM	H2 valve closed
7/27/2010	11:03:47 PM	BCl3 valve closed
7/27/2010	11:03:47 PM	PH3 valve closed
7/27/2010	11:03:47 PM	SiCl4 pre valve closed
7/27/2010	11:03:47 PM	SiCl4 post valve closed
7/27/2010	11:03:47 PM	Main Vac valve closed
7/27/2010	11:03:47 PM	Bypass valve closed
7/27/2010	11:03:47 PM	Bubbler valve closed
7/27/2010	11:03:47 PM	Helium MFC set to  0.000000
7/27/2010	11:03:47 PM	H2 MFC set to  0.000000
7/27/2010	11:03:47 PM	BCl3 MFC set to  0.000000
7/27/2010	11:03:47 PM	PHl3 MFC set to  0.000000
7/27/2010	11:03:47 PM	SiCl4 MFC set to  0.000000
7/27/2010	11:03:47 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	11:03:47 PM	Tube furnace set to 0
7/27/2010	11:03:48 PM	Run finished at 11:03 PM
7/27/2010	11:03:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/27/2010	11:10:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	11:10:11 PM	Recipe started at 11:10 PM
7/27/2010	11:10:11 PM	Helium valve closed
7/27/2010	11:10:11 PM	H2 valve closed
7/27/2010	11:10:11 PM	BCl3 valve closed
7/27/2010	11:10:11 PM	PH3 valve closed
7/27/2010	11:10:11 PM	SiCl4 pre valve closed
7/27/2010	11:10:11 PM	SiCl4 post valve closed
7/27/2010	11:10:11 PM	Main Vac valve closed
7/27/2010	11:10:11 PM	Bubbler valve closed
7/27/2010	11:10:11 PM	Bypass valve opened
7/27/2010	11:10:11 PM	Helium MFC set to  0.000000
7/27/2010	11:10:11 PM	H2 MFC set to  0.000000
7/27/2010	11:10:11 PM	BCl3 MFC set to  0.000000
7/27/2010	11:10:11 PM	PHl3 MFC set to  0.000000
7/27/2010	11:10:11 PM	SiCl4 MFC set to  0.000000
7/27/2010	11:10:11 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	11:10:11 PM	Tube furnace set to 0
7/27/2010	11:10:47 PM	Helium valve closed
7/27/2010	11:10:47 PM	H2 valve closed
7/27/2010	11:10:47 PM	BCl3 valve closed
7/27/2010	11:10:47 PM	PH3 valve closed
7/27/2010	11:10:47 PM	SiCl4 pre valve closed
7/27/2010	11:10:47 PM	SiCl4 post valve closed
7/27/2010	11:10:47 PM	Bubbler valve closed
7/27/2010	11:10:47 PM	Main Vac valve opened
7/27/2010	11:10:47 PM	Bypass valve opened
7/27/2010	11:10:47 PM	Helium MFC set to  0.000000
7/27/2010	11:10:47 PM	H2 MFC set to  0.000000
7/27/2010	11:10:47 PM	BCl3 MFC set to  0.000000
7/27/2010	11:10:47 PM	PHl3 MFC set to  0.000000
7/27/2010	11:10:47 PM	SiCl4 MFC set to  0.000000
7/27/2010	11:10:47 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	11:10:47 PM	Tube furnace set to 0
7/27/2010	11:10:47 PM	Run finished at 11:10 PM
7/27/2010	11:10:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/27/2010	11:13:00 PM	Bypass valve closed
7/27/2010	11:13:01 PM	Main Vac valve closed
7/27/2010	11:13:05 PM	Main Vac valve opened
7/27/2010	11:13:06 PM	Bypass valve opened
7/27/2010	11:23:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/27/2010	11:23:50 PM	Recipe started at 11:23 PM
7/27/2010	11:23:50 PM	Helium valve closed
7/27/2010	11:23:50 PM	H2 valve closed
7/27/2010	11:23:50 PM	BCl3 valve closed
7/27/2010	11:23:50 PM	PH3 valve closed
7/27/2010	11:23:50 PM	SiCl4 pre valve closed
7/27/2010	11:23:50 PM	SiCl4 post valve closed
7/27/2010	11:23:50 PM	Main Vac valve closed
7/27/2010	11:23:50 PM	Bubbler valve closed
7/27/2010	11:23:50 PM	Bypass valve opened
7/27/2010	11:23:50 PM	Helium MFC set to  0.000000
7/27/2010	11:23:50 PM	H2 MFC set to  0.000000
7/27/2010	11:23:50 PM	BCl3 MFC set to  0.000000
7/27/2010	11:23:50 PM	PHl3 MFC set to  0.000000
7/27/2010	11:23:50 PM	SiCl4 MFC set to  0.000000
7/27/2010	11:23:50 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	11:23:50 PM	Tube furnace set to 0
7/27/2010	11:23:50 PM	Helium valve closed
7/27/2010	11:23:50 PM	H2 valve closed
7/27/2010	11:23:50 PM	BCl3 valve closed
7/27/2010	11:23:50 PM	PH3 valve closed
7/27/2010	11:23:50 PM	SiCl4 pre valve closed
7/27/2010	11:23:50 PM	SiCl4 post valve closed
7/27/2010	11:23:50 PM	Bubbler valve closed
7/27/2010	11:23:50 PM	Main Vac valve opened
7/27/2010	11:23:50 PM	Bypass valve opened
7/27/2010	11:23:50 PM	Helium MFC set to  0.000000
7/27/2010	11:23:50 PM	H2 MFC set to  0.000000
7/27/2010	11:23:50 PM	BCl3 MFC set to  0.000000
7/27/2010	11:23:50 PM	PHl3 MFC set to  0.000000
7/27/2010	11:23:50 PM	SiCl4 MFC set to  0.000000
7/27/2010	11:23:50 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	11:23:51 PM	Tube furnace set to 0
7/27/2010	11:24:51 PM	H2 valve closed
7/27/2010	11:24:51 PM	BCl3 valve closed
7/27/2010	11:24:51 PM	PH3 valve closed
7/27/2010	11:24:51 PM	SiCl4 pre valve closed
7/27/2010	11:24:51 PM	SiCl4 post valve closed
7/27/2010	11:24:51 PM	Bubbler valve closed
7/27/2010	11:24:51 PM	Helium valve opened
7/27/2010	11:24:51 PM	Main Vac valve opened
7/27/2010	11:24:51 PM	Bypass valve opened
7/27/2010	11:24:51 PM	Helium MFC set to  100.000000
7/27/2010	11:24:51 PM	H2 MFC set to  0.000000
7/27/2010	11:24:51 PM	BCl3 MFC set to  0.000000
7/27/2010	11:24:51 PM	PHl3 MFC set to  0.000000
7/27/2010	11:24:51 PM	SiCl4 MFC set to  0.000000
7/27/2010	11:24:51 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	11:24:51 PM	Tube furnace set to 0
7/27/2010	11:33:51 PM	Helium valve closed
7/27/2010	11:33:51 PM	H2 valve closed
7/27/2010	11:33:51 PM	BCl3 valve closed
7/27/2010	11:33:51 PM	PH3 valve closed
7/27/2010	11:33:51 PM	SiCl4 pre valve closed
7/27/2010	11:33:51 PM	SiCl4 post valve closed
7/27/2010	11:33:51 PM	Bubbler valve closed
7/27/2010	11:33:51 PM	Main Vac valve opened
7/27/2010	11:33:51 PM	Bypass valve opened
7/27/2010	11:33:51 PM	Helium MFC set to  0.000000
7/27/2010	11:33:51 PM	H2 MFC set to  0.000000
7/27/2010	11:33:51 PM	BCl3 MFC set to  0.000000
7/27/2010	11:33:51 PM	PHl3 MFC set to  0.000000
7/27/2010	11:33:51 PM	SiCl4 MFC set to  0.000000
7/27/2010	11:33:51 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	11:33:51 PM	Tube furnace set to 0
7/27/2010	11:34:51 PM	H2 valve closed
7/27/2010	11:34:51 PM	BCl3 valve closed
7/27/2010	11:34:51 PM	PH3 valve closed
7/27/2010	11:34:51 PM	SiCl4 pre valve closed
7/27/2010	11:34:51 PM	SiCl4 post valve closed
7/27/2010	11:34:51 PM	Bubbler valve closed
7/27/2010	11:34:51 PM	Helium valve opened
7/27/2010	11:34:51 PM	Main Vac valve opened
7/27/2010	11:34:51 PM	Bypass valve opened
7/27/2010	11:34:51 PM	Helium MFC set to  100.000000
7/27/2010	11:34:51 PM	H2 MFC set to  0.000000
7/27/2010	11:34:51 PM	BCl3 MFC set to  0.000000
7/27/2010	11:34:51 PM	PHl3 MFC set to  0.000000
7/27/2010	11:34:51 PM	SiCl4 MFC set to  0.000000
7/27/2010	11:34:51 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	11:34:51 PM	Tube furnace set to 0
7/27/2010	11:43:51 PM	Helium valve closed
7/27/2010	11:43:51 PM	H2 valve closed
7/27/2010	11:43:51 PM	BCl3 valve closed
7/27/2010	11:43:51 PM	PH3 valve closed
7/27/2010	11:43:51 PM	SiCl4 pre valve closed
7/27/2010	11:43:51 PM	SiCl4 post valve closed
7/27/2010	11:43:51 PM	Bubbler valve closed
7/27/2010	11:43:51 PM	Main Vac valve opened
7/27/2010	11:43:51 PM	Bypass valve opened
7/27/2010	11:43:51 PM	Helium MFC set to  0.000000
7/27/2010	11:43:51 PM	H2 MFC set to  0.000000
7/27/2010	11:43:51 PM	BCl3 MFC set to  0.000000
7/27/2010	11:43:51 PM	PHl3 MFC set to  0.000000
7/27/2010	11:43:51 PM	SiCl4 MFC set to  0.000000
7/27/2010	11:43:51 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	11:43:51 PM	Tube furnace set to 0
7/27/2010	11:44:51 PM	H2 valve closed
7/27/2010	11:44:51 PM	BCl3 valve closed
7/27/2010	11:44:51 PM	PH3 valve closed
7/27/2010	11:44:51 PM	SiCl4 pre valve closed
7/27/2010	11:44:51 PM	SiCl4 post valve closed
7/27/2010	11:44:51 PM	Bubbler valve closed
7/27/2010	11:44:51 PM	Helium valve opened
7/27/2010	11:44:51 PM	Main Vac valve opened
7/27/2010	11:44:51 PM	Bypass valve opened
7/27/2010	11:44:51 PM	Helium MFC set to  100.000000
7/27/2010	11:44:51 PM	H2 MFC set to  0.000000
7/27/2010	11:44:51 PM	BCl3 MFC set to  0.000000
7/27/2010	11:44:51 PM	PHl3 MFC set to  0.000000
7/27/2010	11:44:51 PM	SiCl4 MFC set to  0.000000
7/27/2010	11:44:51 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	11:44:52 PM	Tube furnace set to 0
7/27/2010	11:53:52 PM	Helium valve closed
7/27/2010	11:53:52 PM	H2 valve closed
7/27/2010	11:53:52 PM	BCl3 valve closed
7/27/2010	11:53:52 PM	PH3 valve closed
7/27/2010	11:53:52 PM	SiCl4 pre valve closed
7/27/2010	11:53:52 PM	SiCl4 post valve closed
7/27/2010	11:53:52 PM	Bubbler valve closed
7/27/2010	11:53:52 PM	Main Vac valve opened
7/27/2010	11:53:52 PM	Bypass valve opened
7/27/2010	11:53:52 PM	Helium MFC set to  0.000000
7/27/2010	11:53:52 PM	H2 MFC set to  0.000000
7/27/2010	11:53:52 PM	BCl3 MFC set to  0.000000
7/27/2010	11:53:52 PM	PHl3 MFC set to  0.000000
7/27/2010	11:53:52 PM	SiCl4 MFC set to  0.000000
7/27/2010	11:53:52 PM	Bypass solenoid MFC set to  0.000000
7/27/2010	11:53:52 PM	Tube furnace set to 0
7/27/2010	11:53:53 PM	Run finished at 11:53 PM
7/27/2010	11:53:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
